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MicroElectroMechanical Systems (MEMS) Inertial Measurement Unit ( IMU)

MicroElectroMechanical Systems (MEMS) Inertial Measurement Unit ( IMU). Attitude relative to gravity vector Magnetic heading Rotational velocity Translational acceleration. Positives. Absolute rotational attitude of object Direct measurement of angular velocity

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MicroElectroMechanical Systems (MEMS) Inertial Measurement Unit ( IMU)

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  1. MicroElectroMechanical Systems (MEMS) Inertial Measurement Unit (IMU) • Attitude relative to gravity vector • Magnetic heading • Rotational velocity • Translational acceleration IMU

  2. Positives • Absolute rotational attitude of object • Direct measurement of angular velocity • Direct measurement of translational acceleration IMU

  3. Negatives • Does not provide – • absolute location • translational velocity • rotational acceleration • Data communication • Medium resolution • < 150 Hz IMU

  4. History of IMUs • Vehicle navigation • Intercontinental ballistic missiles (ICBM) • Nuclear submarines • Cruise missiles • MEMS • Automotive • Consumer products IMU

  5. MEMS IMUs - Automotive • Automotive • Accelerometers to deploy airbags • Vehicle roll handling IMU

  6. MEMS IMUs – Consumer Products • Games (WiiMote) • PDA (iPhone) • Camera stabilization • Hard disks IMU

  7. MEMS Fabrication IMU

  8. MEMS accelerometer(proof mass) gravity acceleration IMU

  9. MEMS Comb Sensor/Drive IMU

  10. MEMS Differential Capacitance IMU

  11. MEMS Differential Capacitance IMU

  12. MEMS accelerometer IMU

  13. MEMS gyro (torsion) IMU

  14. MEMS gyro (planar) IMU

  15. MEMS magnetometer (magnetoresistive) IMU

  16. MEMS IMU Outputs • Signal • Analog voltage (0 to 3V) • Fixed frequency, variable duty cycle • Digital (internal A/D converter) • Nominal Bandwidth • 550 Hz for accelerometer • 150 Hz for gyro • 50 Hz for magnetometer IMU

  17. Two-Dimensional (2D) IMU • Biaxial accelerometer • Uniaxial gyro IMU

  18. az ay ax Three-Dimensional (3D) IMU • Triaxial accelerometer • Triaxial gyro • Triaxial magnetometer • Required to determine spin about gravity vector IMU

  19. 9DOF Board – Sparkfun • Triaxial accelerometer • ±3g, 300 mV/g, 550 Hz • Triaxial gyro • ±300 deg/sec (dps), 3.3mV/dps, 140 Hz • Triaxial magnetometer • 50 Hz • On-board CPU, serial I/O IMU

  20. 9DOF Chip – Invensense MPU-9150 • Triaxial accelerometer • ±2g, ±4g, ±8g and ±16g • Triaxial gyro • ±250, ±500, ±1000, and ±2000dps • Triaxial compass • On-board motion fusion, I2C serial MEMS IMU

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