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Joint Excite – MoreMoore meeting on EUV Resist Technology

Joint Excite – MoreMoore meeting on EUV Resist Technology. Athens 12 May 2005. Few Notes …. Lunch break after the end of joint Excite – MoreMoore meeting ( 12.30 – 14.30 ). Optional Visit to IMEL labs (~15min). Two groups at 14.00 and 14.15.

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Joint Excite – MoreMoore meeting on EUV Resist Technology

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  1. Joint Excite – MoreMoore meeting onEUV Resist Technology Athens 12 May 2005

  2. Few Notes … Lunch break after the end of joint Excite – MoreMoore meeting (12.30 – 14.30). Optional Visit to IMEL labs (~15min). Two groups at 14.00 and 14.15. MoreMoore meeting starts at 14.30 and ends 18.00 at the same room An extra room for informal meetings is available at IMEL’s building Ride to airport, hotels by taxi: Fill the form and give it back until the end of coffee break. Destinations: Airport, Metro Station, … Dinner at Plaka area. Start from Hotel Herodion at 20.30 (10-15minutes walk) Tomorrow: We will meet again at 08.30 at the Ethniki Amina Metro station.

  3. 09:00 Welcome Ioannis Raptis 09:05 Objectives, agenda Peter Zandbergen / Serge Tedesco 09:10 Introduction EXCITE Resist Wolf-Dieter Domke 09:20 Introduction More Moore Resist Karl van Werden 09:30 CAR limits / LER / Diffusion 5 min. - IMEC 8 min. - IMEL 5 min. - TNO 5 min. - Philips 10 min. Wrap-up CAR Limits / LER / Diffusion W-D.D.; K.v.W. 10.05Screening and Patterning 5 min. - IMEC 5 min. - ASML 5 min. - CEA-Leti 10 min. Wrap-up Screening and Patterning W-D.D.; K.v.W. 10.30 Coffee Break 10.45 Outgassing 5 min. - CEA-Leti 5 min. - Infineon 5 min. - Elettra 5 min. - AZ-EM 10 min. Wrap-up Outgassing W-D.D.; K.v.W. 11.15 Materials/Characterization 5 min. - AZ-EM 5 min. - Infineon 8 min. - IMEL 5 min. - CNRS 10 min. Wrap-up Materials W-D.D.; K.v.W. 11:50 Discussion on task overlaps, gaps, synergies, … All 12:10 Coordination EXCITE/More Moore Resist path forward P.Z.; W-D.D.; K.v.W.; All 12:35 Adjourn / Lunch All

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