1 / 8

Crossbeam User’s Group Meeting 10/06/2006

Crossbeam User’s Group Meeting 10/06/2006 . Crossbeam User’s Group Meeting 10/06/2006. Agenda Introduction: Who is David Frey? Plans, Ideas, and Status: What do we want to get out of the 1540 EsB? Potential projects Future needs Proposed changes Current System Status Suggestions

tarika
Download Presentation

Crossbeam User’s Group Meeting 10/06/2006

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Crossbeam User’s GroupMeeting 10/06/2006

  2. Crossbeam User’s GroupMeeting 10/06/2006 • Agenda • Introduction: • Who is David Frey? • Plans, Ideas, and Status: • What do we want to get out of the 1540 EsB? • Potential projects • Future needs • Proposed changes • Current System Status • Suggestions • Feedback

  3. Crossbeam User’s GroupMeeting 10/06/2006 • Introduction: • ~ 9.5 years with Carl Zeiss SMT (LEO) • Conventional/Environmental SEM • FESEM • XB • 2 Years @ Jackson Labs Bar Harbor, ME • Light Microscopy • IA • SEM • TEM • Webpage publishing • Desktop publishing • 2.5 Years @ OCG Microelectronic Materials • SEM • Metrology • Desktop Publishing • Lawrence University, Appleton, WI • Bachelor’s Degree in Biology • TEM sample prep, and imaging • Light Microscopy

  4. Crossbeam User’s GroupMeeting 10/06/2006 • Plans, Ideas, and Status: • What do we want to get out of the 1540 EsB? • Defect Analysis • Sample Analysis • TEM Sample Prep • Sample modification • Circuit Edit? • Work with the Zyvex Systems • TEM Sample Preparation

  5. Crossbeam User’s GroupMeeting 10/06/2006 • Plans, Ideas, and Status: • Potential projects: • Your Suggestions Here:

  6. Crossbeam User’s GroupMeeting 10/06/2006 • Plans, Ideas, and Status: • Future needs: • Airlock • Cryo System • Plasma Cleaner • Different TEM Sample LO System • Suggestions Welcome

  7. Crossbeam User’s GroupMeeting 10/06/2006 • Plans, Ideas, and Status: • Proposed changes: • Move the STEM Detector to the SUPRA • Add an airlock • Faster sample turn around • Quicker use of GIS • Semi-Weekly Maintenance checks • i-Beam • e-Beam • Stage • Vacuum system • GIS

  8. Crossbeam User’s GroupMeeting 10/06/2006 • Plans, Ideas, and Status: • Current System Status • FIB Column i-probes checked, and adjusted • Currents look good • 20nA is low • Others are cutting well, and are close to stated value • Vacuums look good on both columns. • Gemini Image appears to be good • GIS Status • Pt Deposition: Good • W Deposition: Non-functional • Insulator: Untested to date • H2O and XEF2 Etches untested • Suggestions

More Related