Small Feature Reproducibility

1. Small Feature Reproducibility

2. Small Feature Reproducibility Measuring, Understanding and Controlling Variability in deep sub-micron patterning UC-SMART Major Program Award E. Aydil, J. Bokor, N. Cheung, D. Dornfeld, B. Dunn, D. Graves, E. Haller, M. Lieberman, A. Neureuther, K. Poolla, R. Smith, O. Solgaard C. Spanos University of California Berkeley, Davis, Los Angeles, Santa Barbara 11/8/99 SFR Workshop - Overview

3. Program Goals • Cultivate a new discipline that focuses on the reproducibility of small features. • Pursue solutions by focusing on: • fundamental understanding • modeling variability mechanisms • sensing variability causes during production • Our context is lithography, plasma, CMP, diffusion, and the way these steps interact with each other. SFR Workshop - Overview

4. Target Technologies • Lithography 193 / 157 / 14nm (0.18mm - 0.05mm) • Plasma and Reactive Ion Etching • Chemical Mechanical Polishing • Transient Enhanced Diffusion • Sensors and Metrology for the above SFR Workshop - Overview

5. Small Feature Reproducibility • Capture • In-situ and off-line metrology • Hierarchical Analysis of Variance • Understand • Resist, Plasma, Diffusion Modeling • Variability Impact on Device / Interconnect Performance • Control • on-wafer / real-time / in-situ sensors • run-to-run and real-time control • process diagnosis • chamber, process and product design SFR Workshop - Overview

6. Major Program Thrusts Lithography Plasma Etching SFR TED Education Sensor Integration CMP SFR Workshop - Overview

7. Changes since May, 1999 • Professor Eugene Haller (UCB) joined us to work on transient enhanced diffusion in the second year. • Professor Tsue-Jae King (UCB) helped us re-design the major undergraduate processing class. • Professor Eray Aydil (UCSB) joined us to work on in-chamber plasma sensors. • Aplex left the group (and the business), Nanometrics joined the group. • The 6-inch conversion for the Berkeley Microlab has been funded by other means and is on its way. SFR Workshop - Overview

8. Industrial Relations • Held two workshops (11/17/98 and 11/8/99), annual review (5/13/99). • Established industrial mentors, 15-member steering committee. • Opened bi-weekly seminars to industry via the Web. • Our “interactions” database captures broad interactions since the beginning of this program. SFR Workshop - Overview

9. Technology Transfer • Many visits, discussions, presentations. • Bi-weekly seminar regularly attended by project mentors via simulcast on our web site. • Timbre Technology, winner of Haas business plan competition, received seed funding. • Auto calibration of lithography simulators. • Scatterometry based profile reconstruction. • Autonomous Wafer Sensors (AWS) • Autonomous / modular temperature measurement wafers. • Plasma temperature metrology (>40 sensors/wafer, >1Hz full field monitoring, new capabilities). SFR Workshop - Overview

10. Highlights... • Our second year has been approved by the state, after a successful first year report in September 1999. • Bi-weekly teleconferencing seminars continue with technical talks this semester. • ~30 graduate students, 12 Professors, 4 UC campuses • SOPRA Spectroscopic Ellipsometer • CMP Cleaner • CMP in place • New P5000 identified at Intel, refurbished by AMAT • MR2 substituted with M2I, received from Novellus last week. New room completed. • 6-inch conversion under way • New teaching lab operational! SFR Workshop - Overview

11. http://sfr/berkeley.edu • Depository for • publications • resumes • project database • meeting agendas • demonstrations • posters • presentations • New software for presenting • inter-campus, inter-industry, • interactive, technical seminars. SFR Workshop - Overview

12. http://sfr.berkeley.edu SFR Workshop - Overview

13. Today’s Objectives 1. Present and discuss Progress. 2. Discuss 2000-2002 ideas. Two year extension proposal due late spring 2000. 3. Bring, PIs, students, industrial participants together. SFR Workshop - Overview

14. Plans for 2000 renewal The theme for 1998-2000 was: “how to measure, understand and model small feature reproducibility”. The theme for 2000-2002 might be: “why reproducibility matters andhow to control it” SFR Workshop - Overview

15. What really limits these numbers? ITRS Conference7/99 SFR Workshop - Overview

16. CD Metrology will need a (R)evolution... ITRS Conference7/99 SFR Workshop - Overview

17. General Reproducibility Model Circuit performance model, predict and improve CD, thin films measure and model Fundamental causes optics, chemistry, etc. model and understand SFR Workshop - Overview

18. Web site, etc. Timothy D. Duncan 524 Cory Hall, CSG phone: (510) 643-7542 fax: (510) 642-2739 tduncan@eecs.berkeley.edu Account Management Brad Dexter 558 Cory Hall, ERL phone: (510) 643-6680 fax: (510) 643-5052 bdexter@eecs.berkeley.edu People to Meet and Places to Go Administrative Support Debra Krauss 558 Cory Hall, ERL phone: (510) 643-9705 fax: (510) 642-2739 debrak@eecs.berkeley.edu University of California, Berkeley CA, 94720-1770 http://sfr.berkeley.edu Access restricted by password. SFR Workshop - Overview

19. 2st Annual SFR Workshop, November 8, 1999 8:30 – 9:00 Introductions, Overview / Spanos 9:00 – 10:15 Lithography / Spanos, Neureuther, Bokor 10:15 – 10:45 Break 10:45 – 12:00 Sensor Integration / Poolla, Smith, Solgaard, Dunn 12:00 – 1:00 lunch, poster session begins 1:00 – 2:15 Plasma, TED / Graves, Lieberman, Cheung, Aydil, Haller 2:15 – 2:45 CMP / Dornfeld 2:45 – 3:30 Education / Graves, King, Spanos 3:30 – 3:45 Break 3:45 – 5:30 Steering Committee Meeting in room 775A / Lozes 5:30 – 7:30 Reception, Dinner / Heynes rm, Men’s Faculty Club