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Numerical Simulations comparing SPDT Experiments on Silicon Carbide

Numerical Simulations comparing SPDT Experiments on Silicon Carbide. John A. Patten. Western Michigan University. TOHOKU UNIVERSITY. Contents. Summary of experimental procedures Summary of simulation setup Results and Analysis Summary and conclusion Latest work SiC Fly-cutting experiment

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Numerical Simulations comparing SPDT Experiments on Silicon Carbide

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  1. Numerical Simulations comparing SPDT Experiments on Silicon Carbide John A. Patten Western Michigan University TOHOKU UNIVERSITY

  2. Contents • Summary of experimental procedures • Summary of simulation setup • Results and Analysis • Summary and conclusion • Latest work • SiC Fly-cutting experiment • Silicon scratching simulation

  3. Single Crystal SiC Wafer specification

  4. Setup for machining operations (Expt. Set I) Experimental setup (photo) Scheme for generating different rake angles

  5. Experimental Tool and Process specifications * Experiment conducted using round nose tool

  6. Simulation Tool and Process specifications

  7. Simulation results for 250nm feed

  8. Comparison of Cutting Force (Expt. Set I)0° rake

  9. Comparison of Thrust Force (Expt. Set I)0° rake

  10. Comparison of Cutting Force-45° rake

  11. Comparison of Thrust Force-45° rake

  12. Cutting Force Comparison-45° rake

  13. Thrust Force Comparison-45° rake

  14. Summary of Force comparisonExperiment and Simulation

  15. Summary and Conclusions • 2-D turning simulations were conducted to predict cutting and thrust forces using a Drucker-Prager yield criterion • Simulations able to predict forces under ductile cutting • Simulation not able to predict forces under brittle cutting • Tool deflection leads to reduction in effective feed leading to variation in results between experiments and simulations

  16. Fly-cutting experiments

  17. Wafer cutting results – force plot

  18. Fly-cut # 2 from WYKO

  19. Additional Slides

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