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Al- Azawi , Anas Fahad Berdova , Maria Jannatul , Susoma Mutanen , Ilkka

Key Issues In Purchasing DRIE system. Al- Azawi , Anas Fahad Berdova , Maria Jannatul , Susoma Mutanen , Ilkka. Initial Phase : 1. week – 2. week. Foundation of innovation and research Aalto/VTT. Conduct active interdisciplinary research - Choosing the device. Main Goal.

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Al- Azawi , Anas Fahad Berdova , Maria Jannatul , Susoma Mutanen , Ilkka

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  1. Key Issues In Purchasing DRIE system Al-Azawi, Anas Fahad Berdova, Maria Jannatul, Susoma Mutanen, Ilkka

  2. Initial Phase : 1. week – 2. week Foundation of innovation and research Aalto/VTT Conduct active interdisciplinary research- Choosing the device Main Goal Relevant tools to be purchased DRIE system from a reliable supplier that demonstrate the ability to supply, implemet and provide continued customer service. LAM, Oxford, STS,... Applications: Type of devices to be manufactured

  3. Initial Phase : 2. week – 3. week Main Goal Conduct active interdisciplinary research- Choosing the device Technical Logistics • - Licenses • Allowence to disclose technical information through publication • Price • Cost of ownership • Delivery • Involving Aalto/VTT stuff and assigning jobs • Asking for quotation • Financial department • Contract • Cryo or Bosch • Aspect ratio • Selectivity to PR • Etech rates • Sidewall rouhness • Interface and simplicity of usage • Wafer size • Multiple wafer chuck • Vacuum degree and pump specification • Robotic arm • MFC’s • Metal compatibilty in the chamber • Alarms • Pumping time • Load lock

  4. Intermediate Phase : 4. week – 12. week Main Goal Conduct active interdisciplinary research- Infrastructures Technical Logistics • - Facilitating the placement of the device ( arraging a room for the device to be placed ) • Gases • Gas Alarms • - Suppliers • Gas lines maintenance • Collaboraters and industrial partners • Laywers • - Signing the contract • Transportation to the final destination • Gas pipes installation • Gases ( Cl2, CF4, SF6, He, N2, Ar) • - Waste handling (toxicity) • Waterline • Liquid nitrogen • Preperation for the treatment of the exhaust gases

  5. Advanced Phase : 13. week – 24. week Main Goal Conduct active interdisciplinary research- Installing and testing the device Technical Logistics • - Software(PC ) • Micronova • - Clean room engineer • Main users ( Viktor,Yukka); their connection with the supplier company and their duties after installation • Gas pipes installation • Cooling pipes maintenance • - Maintenance interval • Repair/ maintenance • Cost of a single process while the system is running • Amount of users • Know how/ Experience using RIE • Training of the users and generating licenses • Peso and Lims • Safety manuals • Test runs • Gases ( Cl2, C4F8, SF6, He, N2,Ar) • Impurity level • Gas level detection • - Only Si ( What is the possiblity of III –V materials) • Compability • Chuck( cleaning and spareparts) • - Micro controllers • - Helium (leakage rate) • - From Flourine to chloride mode • - How to change from 4” to 2” • - Alarm test

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