1 / 12

Modeling levels

Modeling levels. Domains. Electric Mechanical Electrostatic Piezoelectric Piezoresistive Acoustic Fluidic. Tolerances. R elative process tolerances : 3-5% MEMS device tolerance can be 20-30% Product spec can be 0.01 %. h. What is lumped element modelling ?.

usoa
Download Presentation

Modeling levels

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Modelinglevels

  2. Domains • Electric • Mechanical • Electrostatic • Piezoelectric • Piezoresistive • Acoustic • Fluidic

  3. Tolerances Relative processtolerances: 3-5% MEMS devicetolerancecan be 20-30% Product speccan be 0.01 % h

  4. What is lumped element modelling? • Reductionofthenumberof variables • Mappingontoelectricaldomain(optional) Lowrie et. al 2005

  5. It involves • Turning partial differential equations into ordinary differential equations • Approximations and more approximations • (Ab-)use of available tools

  6. Partitioning and choice of variables (x,v) Find values for the parameters (m,k,γ) Couple Analyze Procedure x

  7. Partitioning and choice of variables x Sometimesintuitive displacements Sometimes eigenmodes of a sub-system Partitioning and choiceof variables (x,v) Find values for the parameters (m,k,γ) Couple Analyze

  8. Parameter extraction • Solution of partial differential equations • Formulas • Experiment • Guesswork Partitioning and choice of variables (x,v) Find values for the parameters (m,k,γ) Couple Analyze

  9. Piezoresistance R

  10. Coupling • Often trivial • Sometimes trivial problems • Effort and flow variables • Choice of variable • Sometimesdemanding (FEM) Partitioning and choiceof variables (x,v) Findvalues for the parameters (m,k,γ) Couple Analyze

  11. Tools for analysis • (Generalized) impedance • State variables • Circuit simulators • Transfer function • Transfer matrix • Laplacetransform • Fouriertransform • Convolution • (Measurement) Partitioning and choiceof variables (x,v) Findvalues for the parameters (m,k,γ) Couple Analyze

More Related