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Spin Coating Experiment: Development of Film Thickness Correlation on 150 mm wafer

Overview. Project ObjectivesProject PlanningBackground and Experimental MethodsResults and ConclusionsRecommendationsQuestions. Project Objectives. Establish a correlation of silicone oil film thickness with respect to:- Spin duration - Rotation speed- Fluid viscosity. Determine the optimum settings for uniform coating process of a Non-Newtonian fluid.

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Spin Coating Experiment: Development of Film Thickness Correlation on 150 mm wafer

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    1. Spin Coating Experiment: Development of Film Thickness Correlation on 150 mm wafer Erin Hadi Nathan Towlerton Kysinh Nguyen March 08th 2005

    2. Overview Project Objectives Project Planning Background and Experimental Methods Results and Conclusions Recommendations Questions

    3. Project Objectives Establish a correlation of silicone oil film thickness with respect to: - Spin duration - Rotation speed - Fluid viscosity

    4. Project Significance Exposure to processes involved in microelectronics industry Comparison between real results and theory learned from lectures Improve project planning and troubleshooting skills

    5. Project Planning Erin Hadi (Team Leader) - lead experiments and decision-making - wafer cleaning and polishing - measure initial weight Nathan Towlerton (Safety Coordinator) - measure and dispense fluid - measure final weight - develop safety manual Kysinh Nguyen (Operations Coordinator) - record data - preliminary data analysis - develop operations manual

    6. Project Planning To increase time efficiency: project familiarization MS project plan team members were assigned specific tasks prior to laboratory period research literature and previous work

    7. Safety Precaution MSDS by Safety Coordinator Proper use of safety gear: - goggles - vinyl gloves - lab coat

    9. Design of Experiment

    10. Experimental Procedure

    11. Spin Coat Theory Used in semiconductor thin film applications Driven by centripetal accelerations Film thickness depends on fluid properties and spin parameters Static dispense vs. Dynamic dispense

    12. Equipment Schematic

    13. Industrial-scale Spin Coater

    14. Troubleshooting

    15. Spin Coat Theory Film thickness is inversely proportional to the spin speed: H~?-N Case 1: No Evaporation – film thickness varies with spin speed and time: H~?-1t -0.5 Case 2: Constant Evaporation Rate: H~?-0.67 Case 3: In most applications, the evaporation rate varies with the square root of the spin speed: H~?-0.5

    16. Assumptions Uniform coating Full-round wafer Equal amount of dispense fluid Negligible evaporation rate Constant exhaust variables Wafer placement is centered at chuck Fluid is dispensed at center Negligible ambient conditions

    17. Data analysis

    18. Data Analysis

    19. Results: low rpm

    20. Results: medium rpm

    21. Results: high rpm

    22. Results: short period

    23. Results: medium period

    24. Results: long period

    25. Results: viscosity dependence

    26. Conclusion Silicone oil sample

    27. Results: Non-Newtonian fluid

    28. Results: Non-Newtonian fluid

    29. Conclusion

    30. Recommendations Determine dispense fluid efficiency Incorporate acceleration effect (ramp speed) Implement dynamic dispense method Uniformity measurements Incorporate evaporation rate to improve film stability

    31. Reference http://www.ece.gatech.edu/research/labs/vc/packaging/theory/spin_theory.html http://www.brewerscience.com/cee/technical/spintheory.html Winegar-Thurston, Noel. “Effects of Viscosity, Rotation Speed, and Duration Time of Silicone Oils in Spin Coating”. (February 2, 2005)

    32. Questions?

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