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Overview. Project ObjectivesProject PlanningBackground and Experimental MethodsResults and ConclusionsRecommendationsQuestions. Project Objectives. Establish a correlation of silicone oil film thickness with respect to:- Spin duration - Rotation speed- Fluid viscosity. Determine the optimum settings for uniform coating process of a Non-Newtonian fluid.
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1. Spin Coating Experiment:Development of Film Thickness Correlation on 150 mm wafer Erin Hadi
Nathan Towlerton
Kysinh Nguyen
March 08th 2005
2. Overview Project Objectives
Project Planning
Background and Experimental Methods
Results and Conclusions
Recommendations
Questions
3. Project Objectives Establish a correlation of silicone oil film thickness with respect to:
- Spin duration
- Rotation speed
- Fluid viscosity
4. Project Significance Exposure to processes involved in microelectronics industry
Comparison between real results and theory learned from lectures
Improve project planning and troubleshooting skills
5. Project Planning Erin Hadi (Team Leader)
- lead experiments and decision-making
- wafer cleaning and polishing
- measure initial weight
Nathan Towlerton (Safety Coordinator)
- measure and dispense fluid
- measure final weight
- develop safety manual
Kysinh Nguyen (Operations Coordinator)
- record data
- preliminary data analysis
- develop operations manual
6. Project Planning To increase time efficiency:
project familiarization
MS project plan
team members were assigned specific tasks prior to laboratory period
research literature and previous work
7. Safety Precaution MSDS by Safety Coordinator
Proper use of safety gear:
- goggles
- vinyl gloves
- lab coat
9. Design of Experiment
10. Experimental Procedure
11. Spin Coat Theory Used in semiconductor thin film applications
Driven by centripetal accelerations
Film thickness depends on fluid properties and spin parameters
Static dispense vs. Dynamic dispense
12. Equipment Schematic
13. Industrial-scale Spin Coater
14. Troubleshooting
15. Spin Coat Theory Film thickness is inversely proportional to the spin speed:
H~?-N
Case 1: No Evaporation – film thickness varies with spin speed and time:
H~?-1t -0.5
Case 2: Constant Evaporation Rate:
H~?-0.67
Case 3: In most applications, the evaporation rate varies with the square root of the spin speed:
H~?-0.5
16. Assumptions Uniform coating
Full-round wafer
Equal amount of dispense fluid
Negligible evaporation rate
Constant exhaust variables
Wafer placement is centered at chuck
Fluid is dispensed at center
Negligible ambient conditions
17. Data analysis
18. Data Analysis
19. Results: low rpm
20. Results: medium rpm
21. Results: high rpm
22. Results: short period
23. Results: medium period
24. Results: long period
25. Results: viscosity dependence
26. Conclusion Silicone oil sample
27. Results: Non-Newtonian fluid
28. Results: Non-Newtonian fluid
29. Conclusion
30. Recommendations Determine dispense fluid efficiency
Incorporate acceleration effect (ramp speed)
Implement dynamic dispense method
Uniformity measurements
Incorporate evaporation rate to improve film stability
31. Reference http://www.ece.gatech.edu/research/labs/vc/packaging/theory/spin_theory.html
http://www.brewerscience.com/cee/technical/spintheory.html
Winegar-Thurston, Noel. “Effects of Viscosity, Rotation Speed, and Duration Time of Silicone Oils in Spin Coating”. (February 2, 2005)
32. Questions?