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Advanced Lithography

Advanced Lithography. Soft lithography Imprint lithography SPM lithography 3D lithography. Soft Lithography. Douglas B. Weibel, Willow R. DiLuzio and George M. Whitesides Nature Reviews Microbiology 5 , 209-218 (March 2007). Contact printing: Patterning of rounded surfaces.

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Advanced Lithography

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  1. Advanced Lithography • Soft lithography • Imprint lithography • SPM lithography • 3D lithography

  2. Soft Lithography Douglas B. Weibel, Willow R. DiLuzio and George M. Whitesides Nature Reviews Microbiology 5, 209-218(March 2007)

  3. Contact printing: Patterning of rounded surfaces http://www.nanoterra.com/soft_lithography.asp Article from IBM J. Res. and Dev. http://www.research.ibm.com/journal/rd/455/michel.html

  4. Patterning organic single-crystal transistor arrays Alejandro L. Briseno, Stefan C. B. Mannsfeld, Mang M. Ling, Shuhong Liu, Ricky J. Tseng, Colin Reese, Mark E. Roberts, Yang Yang, Fred Wudl and Zhenan Bao Nature 444, 913-917(14 December 2006) www.nature.com OTS: octadecyltriethoxysilane Organic single crystals on substrates patterned by microcontact printing. The printing uses PDMS stamps with relief features that are inked with a thick OTS film and then pressed onto the substrates. Patterned single-crystal arrays of different organic semiconductor materials.

  5. Soft Lithography Douglas B. Weibel, Willow R. DiLuzio and George M. Whitesides Nature Reviews Microbiology 5, 209-218(March 2007)

  6. Micro-Transfer Molding http://www.ameslab.gov/final/News/Images/12-layer%20structure.jpg 3-D structures using TM http://www.sciencedaily.com/releases/2006/06/060605081758.htm

  7. Nano-Imprint Lithography (NIL) Hot embossing UV-curable ~20 nm holes Imprint of sub-25 nm vias and trenches in polymers Chou, S.Y. (Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA); Krauss, P.R.; Renstrom, P.J. Source: Applied Physics Letters, v 67, n 21, 20 Nov. 1995, 3114-16

  8. Nano-Imprint Lithography - UV curable http://news.rpi.edu/update.do?artcenterkey=2394 Patterned polyset epoxy siloxane using UV-NIL

  9. Fabrication of NIL template

  10. AFM Lithography - Scratching • Scratching • Tip is scanned over substrate with strong loading force, leaving behind trenches • Direct patterning of substrate or patterning of resist http://www.ntmdt.com/spm-principles/view/afm-lithography-scratching http://www.asylumresearch.com/Gallery/3d/3d5.shtml Scratch lithography on blood cell Scratch lithography on polycarbonate

  11. AFM Lithography - Dynamic Plowing • Dynamic Plowing • Indenting of surface with vibrating tip • Surface is machined in three dimensions www.veeco.com Poem writtenn in PMMA using dynamic plowing. Storage capacity greater than a compact disk

  12. AFM Lithography - Anodic Oxidation • Anodic Oxidation • Applying voltage between tip and metallic surface in wet environment • Tip and the surface interact electrochemically as anode and cathode correspondingly. • Oxide will grow on the point right under the tip http://www.nano.physik.uni-muenchen.de/ http://www.lamia.infm.it/afm_anodic_oxidation.htm AFM image of a Ti/TiOx barrier. The image shows the 70nm wide metallic wire(black), defined by AFM induced oxide, and the barrier. Local Anodic Oxidation (LAO) of perovskite oxides

  13. AFM Lithography - STM Lithography • STM Lithography • Pulsing current causes sample to melt and evaporate under tip http://www.ntmdt.com/spm-principles/view/afm-lithography-scratching STM lithography on Langmuir-Blodgett film

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