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Fabricated Test Suite

Explore the detailed guidelines for designing a microfabricated test suite, specifying devices and measurement instruments, ensuring proper layout and principles, and adhering to a stringent timetable. Discover the necessary measurements, comparison devices, and instruments involved.

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Fabricated Test Suite

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  1. Fabricated Test Suite Design Deadline: 5/1

  2. Agenda • Overview of Materials / Rules / Schedule • Establish General Layout and Principles • Scope of Devices to Fab • Measurement Instruments • Timetable

  3. PolyMUMPS Info

  4. We receive 15 1 cm x 1cm chips… the outside mm is unsafe? 8 mm Jason’s Constants Measurements Raffi’s SA/GA 8 mm Complex Comparison Devices Simple Comparison Devices 4000 µm x 4000 µm sub squares, but flexible to change

  5. Rough Subsquare Capacity • Sufficient distance between devices • Need contacts for electrostatics • Want things to line up, so it is possible to find the devices we’re measuring on the chip. • We can add labels • Want duplicates (5?) so we do not have to remount if one breaks. • 400 µm x 400 µm area for complex devices • Have space for approximately 100 devices / 5 == 20 unique. • 100 µm x 100 µm area for small devices • Have space for 16 * 20 = 320 unique devices.

  6. Simple Comparison Devices MF_C.m MF_Isrc.m MF_L.m MF_R.m MF_Vsrc.m MF_anchor.m MF_beam2d.m MF_beam3d.m MF_comb2d.m MF_eground.m MF_f2d.m MF_f3d.m MF_gap2d.m MF_gap2dforce.m MF_gap3dforce.m MF_opamp.m MF_pos.m MF_vcvs.m Anchor – have a few anchors (but do not want to do too many, as other people have already done extensive tests). Beams – Some simple beams at different angles and different sizes/lengths, different anchorings… as well as different actuation methods Gaps – different sizes and spacings Comb drive – different length/number/spacing of teeth Need to determine what ranges to test.

  7. Complex Comparison Devices • Beamgap • Mirror • Tang Resonator • Cantilever • Serpentine

  8. Measurement Instruments • SMIS (resolves 1 µm in-plane 30-50 nm out-plane static) • Measure surface up to 1 MHz vibrations • Can also serve as just a camera • Possibly will be able to attach probe tips • Microvision (same in-plane as SMIS… depends on magnification) • Like a probe-station camera… can produce AVI • But need a microlab account… • Also, may use Pisano’s camera in 5109 Etch. • Need to coordinate with people in 5109 • Laser Doppler Vibrometer • Measures a single point 0.5 Hz – 1.5 MHz • Also need a microlab account. • Regardless, we may want add markings in the Poly0 layer to eyeball displacements, as well as alignment markings.

  9. Timetable • Mid-late-March • Review the devices we want to include • Early April • Review layout, sanity check • End April • Finalize layout and submit

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