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Recent related paper: Solid State Phenomena, 178-179 (2011) 313

Positron Annihilation on Point Defects in n-FZ –Si:P Single Crystals Irradiated With 15 MeV Protons (or what has been observed beyond expectations) N. Yu. Arutyunov 1,2 , M. Elsayed 1 ,R. Krause-Rehberg 1 , 1 Department of Physics, Martin Luther University, 06120 Halle, Germany

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Recent related paper: Solid State Phenomena, 178-179 (2011) 313

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  1. Positron Annihilation on Point Defects in n-FZ –Si:P Single Crystals Irradiated With 15 MeV Protons (or what has been observed beyond expectations) N. Yu. Arutyunov1,2, M. Elsayed1,R. Krause-Rehberg1, 1Department of Physics, Martin Luther University, 06120 Halle, Germany 2 Institute of Electronics, Tashkent 700170, Uzbekistan V.V. Emtsev3,G.A. Oganesyan3 ,V.V. Kozlovski4 3Ioffe Physico-Technical Institute, St. Petersburg 194021, Russia 4St. Petersburg State Polytechnic University ,St. Petersburg 195251, Russia Recent related paper: Solid State Phenomena, 178-179 (2011) 313

  2. Which Defects Are Produced In n-FZ-Si([P]) Under Irradiation with 15 MeV Protons? ● Oxygen[O] ≈ 1016 cm-3, carbon lean[Ci]≈ 1015 cm-3, n-FZ-Si([P]=7×1015 cm-3) is of special interest because irradiation allows one to change position of Fermi level in wide range. Information about RD created in material is scarce. ●Most probable primary defects are separated Frenkel pairs, V and I; they are movable and they may create various complexes ● Established:Most probablesecondary defects aredivacancies (VV)and donor-vacancy pairs (or E-centers for D=P); ►Anticipated stagesof annealing of defects are completed at: 180°C (E-centers), 280°C(VV)(EPR, DLTS, Hall’s measurements)

  3. What we hoped to obtain creating defects in n-FZ-Si([P]) under irradiation with 15 MeV protons? We hoped to optimize parameters of irradiation/annealing Goal:to control reliably the position of the Fermi level creating E-centers and divacancies We expectedto reach the goal combining isochronal annealing and dose of irradiation Results of annealing surpass all expectations! E (P+)=15 MeV 0,8 mm Si E (P+)=8 MeV Projection range of protons > 1 mm: no stoppage effects ● Slowing down of protons+is due to ionization lost: roughly, average ionization energyI ≈ 172 eV, energy of recoil atomER: 210 eV Generation of vacancies and interstitials dominates

  4. Characterization: Hall’s measurements and removal Of CarriersFrom Conduction Band of n-FZ-Si([P]) Irradiated with 15 MeV Protons (Hall’s measurements) ● Removal rate of electrons: ≈ 110–120 cm-1 (15 MeV H+) and ≈ 0,11 cm-1 (1 MeV electrons)►tecnological advantage of H+ beams ● Concentration of defects has been estimated using these data; Values have been applied for analysis of results obtained by PALS

  5. Temperature Dependency of e+ Lifetime Inn-FZ-Si([P]) Irradiated with 15 MeV Protons ●τav , - strong T-dependency indicates effective positron-phonon interaction ● Value of e+ lifetime suggests defects of a vacancy type (~ 254 ps) ● Shallow e+ state (s): Est ≈ 0,2 – 0,6 meV (Krause-Rehberg, Leipner, 1999) ●We expected:E-centers, VV dominate, they are e+ traps► isochronal annealing must be completed at 280 °C – 300 °C ● We obtained: T- dependency is preserved up to Tann.=340 °C!

  6. Positron Lifetime And Recovery Of Dopant Activity:Deep Donors Of Radiation Origin Hidden At Early Stages of Annealing Of n-FZ-Si([P]) Irradiated With 15 MeV Protons: ● e+ lifetime ~251 ps is steady up to ~ 320°C, then its recovery begins ●E-centers, VVannealed, ~ 35-40% of atoms of Prestored electrical activity ● At 500°C:e+ lifetime vanishes, recovery of electrical activity of atoms of P continues up to 700 °C ●We identify thermally stablee+ trapsas deep donorshidden in early stages of annealing

  7. Temperature Dependency Of Positron Trapping Rate For Deep Donors Of Radiation Origin In n-FZ-Si([P]) Irradiated With 15 MeV Protons ● For deep donors: reciprocal cubic temperature dependencyof e+trapping rate► multi-phonon cascade trappingat attractive center (Abakumov et al., 1978) ● e+Trapping cross-section (averaged over temperature)≈ 6,3×10-13 cm2for concentration of deep donors≈ 1015cm-3(Hall effect and conductivity)

  8. Activation Energy of Annealing Of Deep Donors Of Radiation Origin In n-FZ-Si([P]) Irradiated With 15 MeV Protons Equation of kinetics of chemical reaction (Arutyunov et al., 1977) ● Annealing ► 1st order of reactionγ=1►number of sinks is fixed, new e+traps are not formed ● Ea ≈ 0,74 eVcorresponds to data of EPR: Ea≥ 0,64 eV attributed to dissociation of VV in its neutral state (G.D. Watkins, 1964) ●k is e+trapping rate; λ0-1=τ0 ≈ 216 ps is e+ lifetime in the bulk; λav -1 = τavis e+lifetime at 30K; τd is maximal value of τav

  9. Number of Vacancies In Deep Donors Of Radiation Origin In n-FZ-Si([P]) Irradiated With 15 MeV Protons ● Average e+ lifetime τav overlaps the range of numbers of vacancies in the cluster from 1 to 2 ● Long-lived τav lifetime is in the range of numbers of vacancies from 2 to 3 ● Resume: deep donor contains more than 1 vacancy (most probably: 2 vacancies) ●Black squares: calculations, Hakala et. al, PRB,1998

  10. Formal configuration of deep donordetected in n-FZ-Si ([P]) irradiated with protons 15 MeV ●Two vacancies are in close proximity to atom of P ●Atoms of silicon participate in the closing of bonds ● Decomposition of deep donorrestores impurity atom of P as a shallow donor Relaxation is not shown

  11. Conclusion • ● Deep donorsof radiation origin have been revealed in silicon of n-type conductivity • (n-FZ-Si([P]),irradiated with 15 MeV protons) • ● Data of e+ lifetime: • Configuration of deep donor consists of 2vacancies; • it includes, at least, one atomof phosphorus • ●Anealing of deep donors ranges 320°C to 700°C • Deep donors are hiddenin stages of annealing of well known E-centers and divacancies • (ii) Deep donor is effective trap of e+:σ ≈ 6,3×10-13 cm2 • ●Good electron wave functions are needed(to shed the light on details of configuration of deep donor)

  12. Defects In n-FZ-Si([P]) Single Crystal Irradiated With 15 MeV Protons: Why We Applied PALS? ●Sensitivity of the positron lifetime to vacancy defects and their complexes with atoms of dopant (P) Difficulties in EPR studying of E-center and VV: ►Absence of EPR signal for negatively charged phosphorus-vacancy complex (E-center) ● Insensitivity of EPR signal in the process of isochronal annealing to the charge state of divacancy (VV1+ and VV1–) ●Necessity to assume the existence of the intermediateneutral state of VV which is undetectable by EPR; energy of dissociation of VV0 ≈ 0,64 eV(G.D. Watkins, 1964)

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