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First Results of Micron DSSD

First Results of Micron DSSD. SVD Meeting. 1 st delivery of Micron. Large trapezoidal DSSD (already in probe station). 1 rectangular DSSD 3 quadratic DSSDs with different p-stop configurations. Micron Wafer Layout. 3 different GCDs for the n-side. Quadratic baby sensors 2,3,4

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First Results of Micron DSSD

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  1. First Results of Micron DSSD Thomas Bergauer (HEPHY Vienna) SVD Meeting

  2. 1st delivery of Micron Large trapezoidal DSSD (already in probe station) 1 rectangular DSSD 3 quadratic DSSDs with different p-stop configurations Markus Friedl (HEPHY Vienna)

  3. Micron Wafer Layout 3 different GCDsfor the n-side Quadratic baby sensors 2,3,4 p-side: 512 strips 50 µm pitch 1 interm. strip n-side: 256 strips 100 µm pitch 0 interm. strip different p-stop patterns Main sensor p-side: 768 strips 75-50 µm pitch 1 interm. strip n-side: 512 strips 240 µm pitch 1 interm. strip combined p-stop Teststructures for p-side 1) atoll p-stop varying distance from strip 2) conventional p-stop varying width 3) combined p-stop varying distance from strip Baby sensor 1 p-side: 512 strips 50 µm pitch 1 interm. strip n-side: 512 strips 100 µm pitch 1 interm. strip atoll p-stop 1) 2) 3) Teststructures for n-side(no GCD) Thomas Bergauer (HEPHY Vienna)

  4. Pictures Markus Friedl (HEPHY Vienna)

  5. Crack on one side Markus Friedl (HEPHY Vienna)

  6. Crack on one side Markus Friedl (HEPHY Vienna)

  7. Thickness and Bow • Thickness given by Micron: 304 um • Verified by our measurement • However: ~6% less signal compared to 320 micron of HPK • Bow: currently under investigation in vienna Markus Friedl (HEPHY Vienna)

  8. IV measurements V_depl from IV: ~55 V Thomas Bergauer (HEPHY Vienna)

  9. CV Measurements V_depl from CV: 30 V Markus Friedl (HEPHY Vienna)

  10. Longterm current stability Markus Friedl (HEPHY Vienna)

  11. Summary • Good processing • No visible scratches • One big chipping: ~600 micron into the guard ring • IV behavior comparable to HPK • Long-term Stability reasonable • Strip scan about to start end of next week Markus Friedl (HEPHY Vienna)

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