Objectives:

1. Understanding Constrained Ferroelectric Films for MEMS ApplicationsDong-Joo Kim, Auburn University, DMR 0605270 Objectives: • To study the issues linking piezoelectric thin film material structures with the materials performance for developing advanced piezoelectric MEMS devices Results: • Chemical modifiers of chemical solution for coating piezoelectric films were identified to play an important role in modulating films’ orientation and microstructures (top in right plots). • Characterization of films shows a critical link between properties and structures of films. This understanding is an important step forward in design and fabrication of MEMS devices (middle in right plots). The effects of chemical modifiers in CSD on the preferred orientation of PZT films Orientation dependence of PZT films on nanomechanical and electric properties PZT MEMS structures for understanding the role of substrates

2. Understanding Constrained Ferroelectric Films for MEMS ApplicationsDong-Joo Kim, Auburn University, DMR 0605270 Training and Development: • The project has provided two PhD students with hands on training in literature review, research design, data elicitation and qualitative data analysis Outreach Activities: • The PIs have involved with two outreach activities, i.e. E-day and Talons Days. Talons Days is designed to attract the most outstanding young academic minds from high schools by introducing programs and demonstrating research activities. E-day activity has been performed to invite middle and high school students for providing experience interactive exhibits. Piezoelectric devices were demonstrated in both activities. Dr. Kim participated in the event of E-Day (Engineering Day) designed to provide Middle and High school students to chat one-on-one with students and faculty, experience interactive exhibits, and visit labs.