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WP6: Equipment Forum (Contact: lothar.pfitzner@iisb.fraunhofer.de)

WP1: Survey, Specification, Architecture (contact : martin.schellenberger@iisb.fraunhofer.de). O bjectives.

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WP6: Equipment Forum (Contact: lothar.pfitzner@iisb.fraunhofer.de)

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  1. WP1: Survey, Specification, Architecture(contact : martin.schellenberger@iisb.fraunhofer.de) Objectives The overall objective of WP 1 is to support the other work packages by providing generic specifications and general architectures in order to avoid the implementation of singular solutions or solutions that are not re-usable. Current Activities Survey Workshops at Manufacturer site Discussion of current status and future requirements Analysis of answers 1.1: Conduct surveys regarding current status at partners and their requirements 1.2: Develop HW/SW requirements for virtual metrology integration 1.3: Develop HW/SW requirements for predictive maintenance related decision systems 1.4: Develop HW/SW requirements for adaptive control planning 1.5: Develop HW/SW requirements for advanced sensor networks 1.6: Develop HW/SW requirements for a fab-wide master framework 1.7: Develop models for ROI calculations • Guidelines and HW/SW requirements • VM, PM, ACP • Sensor networks • Fab-wide master framework WP6: Equipment Forum (Contact: lothar.pfitzner@iisb.fraunhofer.de) General Information The Equipment Forum represents the interface between the IMPROVE project and other European companies, especially equipment suppliers, which are not IMPROVE partners. The Equipment Forum should serve as a communication and networking platform to exchange data and information. Objectives It is the overall objective of WP6 to create contacts and collaborations between the users and the equipment suppliers. The close collaboration and the exchange of results gained in the IMPROVE project should lead to enhanced and novel equipment that better suits the needs and requirements of the IC manufactures and IDMs. European Nanoelectronics Forum, November 17, 18 2009 Noordwijk, The Nederlands

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