1 / 23

MEMS Rigid Diaphragm Speaker

MEMS Rigid Diaphragm Speaker. Scott Maghy Tim Havard Sanchit Sehrawat. Macro-scale. Try to make MEMS device based on same concept. Motivation. Few similar products Small size Clandestine Privacy Low power Potential lower cost Highly customizable performance No surgery!.

zeal
Download Presentation

MEMS Rigid Diaphragm Speaker

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

    1. MEMS Rigid Diaphragm Speaker Scott Maghy Tim Havard Sanchit Sehrawat

    2. Macro-scale Try to make MEMS device based on same concept

    3. Motivation Few similar products Small size Clandestine Privacy Low power Potential lower cost Highly customizable performance No surgery!

    4. Current Hearing Devices Few speakers that fit completely inside the ear Some piezoelectric speakers Bone conduction speaker for above the ear: 1 inch long CMOS MEMS speakers exits, and are being developed Several hearing devices Downsides: Require surgery Much larger Cost Complexity

    5. Implantable Hearing Devices Cochlear Implants Auditory Brainstem implants Implantable Middle-ear devices Piezoelectric devices Electromagnetic devices

    7. Piezoelectric Devices Operation Advantage: inert in a magnetic field Disadvantage: Power output directly related to size of crystal. Example: Middle Ear Transducer (MET)

    8. Middle Ear Transducer Translates electrical signals into mechanical motion to directly stimulate the ossicles

    9. Middle Ear Transducer

    10. Electromagnetic Devices Operation Small magnet is attached to vibratory structure in ear Only partially implantable – coil must be housed externally. Sizes of coil & magnet restricted by ear anatomy. Power decreases as the square of the distance between coil & magnet – coil & magnet must be close

    11. Vibrant Soundbridge

    12. Ridged Diaphragm MEMS Speaker

    13. Materials Polysilicon: structural material for cantilever and diaphragm Silicon Oxide: for sacrificial layers Silicon Nitride: isolation of wafer Gold: electrodes and electrical connections

    14. Fabrication

    15. Fabrication

    16. Fabrication

    17. Performance and Optimization

    18. Speaker Mechanics

    19. Acoustic Modeling

    20. Observed Acoustic Power Sound intensity decays quadratically with distance ? This results in limited effective speaker range

    21. Comparison of Acoustic Sound Power

    22. Improvements Implement a process that allows for sealing of speaker cone to support This would give better acoustic properties Could be accomplished by CMOS MEMS procedure Fabricate cone shape with stamping method to achieve better shape and more cost effective fabrication

    23. Improvement Cont. Further research into materials for the cantilevers to decrease stiffness of cantilevers This would allow greater diaphragm displacement and therefore greater intensity Other materials exist with lower Young’s modulus that would accomplish this but fabrication is suspect Other methods of securing the diaphragm “Spring” attachment Decrease the mass of the diaphragm by altering fabrication process

    24. QUESTIONS

More Related