1 / 5

SEY of MgO and Al 2 O 3 as deposited by ALD

SEY of MgO and Al 2 O 3 as deposited by ALD. Slade Jokela, Igor Veryovkin, Alex Zinovev. MgO Thickness – 6nm ALD-deposited 12 at.% C. Al 2 O 3 Thickness – 9nm ALD-deposited 12 at.% C. Film Properties. SEY of Al 2 O 3. Significantly decreased electron beam current

aaron-higgins
Download Presentation

SEY of MgO and Al 2 O 3 as deposited by ALD

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. SEY of MgO and Al2O3 as deposited by ALD Slade Jokela, Igor Veryovkin, Alex Zinovev

  2. MgO Thickness – 6nm ALD-deposited 12 at.% C Al2O3 Thickness – 9nm ALD-deposited 12 at.% C Film Properties

  3. SEY of Al2O3 • Significantly decreased electron beam current • Decreased from ~6A to 0.01A • Dose effect seems to have diminished

  4. UPS of Al2O3 and MgO • Spectra have decreased sensitivity to low energy electrons • Small magnetic fields can deflect electrons away from detector • Will apply bias voltage to sample

  5. Future Plans • Apply voltage bias to sample • This will overcome detector’s “insensitivity” to low kinetic energy electrons • Install electron gun that can be defocused • This will allow us to cover a large area of the sample with electrons • Desorption of surface species may then be detectable by XPS

More Related