From ideas to global industry 40 years of ALD in Finland Tuomo Suntola

1. From ideas to global industry40 years of ALD in FinlandTuomo Suntola

2. From ideas to global industry 1.1.1974 InstrumentariumOy Search for new challenges Late 1973 Research unit Proposals for new products ”Humicap” humiditysensor to Vaisala Oy, 1973

3. The proposal Let’s develop an electroluminescent flat panel display …nobody has done it yet ? ? ? ? ? ? ? ? EL I am still confused – but at a higher level … let’s go ahead

4. The problem and the solution • State of the art: • High performance demonstrated • Major problems with stability due to the high operational voltage Well controlled electronic properties require well ordered material Well order material requires well ordered processing conditions Novel thin film processing technique is needed How about sequential buildup of compounds? May - June 1974

5. The 1st ALE process for ZnS, September 1974 1/3 x monolayer Idea of sequential buildup of compounds, June 1974 Optical thickness monitoring Construction of test equipment Hexagonal ZnS: monolayer 3.13 Å n=2.36 320 C 0.6 mm 4x10-5torr 10-4torr 3x10-3torr 2x10-2torr 0.4 S Zn 100 C 360 C 0.2 2 c/s 0 0 10 20 minutes 12th Baltic ALD, Helsinki 2014

6. 1970 1980 1990 2000 2010 2020 Early ALD reactors EL demos Need, ideas, solution, demonstration, basic patents

7. 1970 1980 1990 2000 2010 2020 Early ALD reactors Pilot & commercial production of EL panels Product prototypes Need, ideas, solution, demonstration, basic patents

8. 1970 1980 1990 2000 2010 2020 Meeting the EL target Pilot & commercial production of EL panels Commercial production of EL panels,Lohja Planar Beneq Product prototypes, reactors for EL production Need, ideas, solution, demonstration, basic patents

9. 1970 1980 1990 2000 2010 2020 40 years of ALD reactors 2005 BeneqOy 2004 Picosun Oy 1999 ASM Microchemistry, commercial reactors & processes Microchemistry Ltd commercial reactors Research for better understanding of ALD chemistry Commercial production of EL panels,Lohja Planar Beneq Product prototypes, reactors for EL production Need, ideas, solution, demonstration, basic patents

10. 1970 1980 1990 2000 2010 2020 From ideas to global industry ALE-4 Linz 1996 ACSI conferences Helsinki University of Technology University of Joensuu 1984 Explosive increase in ALD activity - research & industrial Centre of Excellence From Atomic Layer Epitaxy to Atomic Layer Deposition Greek language: ”epi - taxis” => ”On arrangement” 1984 16th Conference on Solid State Devices and Materials Kobe, Japan 2005 Beneq Oy 2004 Picosun Oy 1999 ASM Microchemistry, commercial reactors & processes Microchemistry Ltd, commercial reactors Research for better understanding of ALD chemistry Commercial production of EL panels,Lohja Planar Beneq Product prototypes, reactors for EL production Need, ideas, solution, demonstration, basic patents

11. From ideas to global industry • There is a Finnish saying: • One picture is worth 1000 words • We found that: • one demo is worth 1000 pictures • one product is worth 1000 demos • vital industry is worth millions of products • What should we celebrate? • A scientist celebrates ideas, • an engineer celebrates successful demoes, • production manager celebrates successful mass production and high yield • marketing manager celebrates orders received • financial manager celebrates money received • general manager and owners celebrate profitable business • everybody celebrates satisfied customers - we have made something important!

12. From ideas to global industry • ALD has proven its usability in numerous applications and • as a tool for understanding chemistry at atomic level! My sincere thanks to all my co-workers during the years and my high appreciation to you all having made the ALD - and the many ideas behind - a success and worth celebrating ! My best wishes for a successful conference and creative future work on the ALD ! Thank you !