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Ultrahigh-Purity Gas Filters

Ultrahigh-Purity Gas Filters. SCF Series. Performance Features. High particle removal efficiency Extremely low particle shedding Faster moisture dry down Low ΔP Lower cost of ownership Inline and surface mount configurations. Performance Features. High particle removal efficiency

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Ultrahigh-Purity Gas Filters

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  1. Ultrahigh-Purity Gas Filters SCF Series

  2. Performance Features • High particle removal efficiency • Extremely low particle shedding • Faster moisture dry down • Low ΔP • Lower cost of ownership • Inline and surface mount configurations

  3. Performance Features • High particle removal efficiency • 99.9999999% @ 0.003µm at maximum rated flow • Extremely low particle shedding • Faster moisture dry down • Low ΔP • Lower cost of ownership • In-line and surface mount configurations

  4. Performance Features • High particle removal efficiency • Extremely low particle shedding • Non-shedding during constant, pulse flow, high pressure differential, and impact test • Extremely low outgassing • Low reactivity • Meets SEMASPEC #93021511A-STD • Faster moisture dry down • Low ΔP • Lower cost of ownership

  5. Moisture Dry-down 100 10 3 ppb Moisture (ppb) 1 METALLIC 0.1 CERAMIC 0 2 4 6 8 10 12 14 16 Hours Performance Features • High particle removal efficiency • Extremely low particle shedding • Faster moisture dry down • Dries faster • Holds less post purge moisture • Purges impurities faster • Low ΔP • Withstands high differential pressures • Lower cost of ownership

  6. 1 bar 2 bar 3 bar Performance Features • High particle removal efficiency • Extremely low particle shedding Faster moisture dry down • Low ΔP • Higher flow than much larger PTFE metallic filters. • Has lower pressure drops than metallic and PTFE filters • Lower cost of ownership • In-line and surface mount configurations

  7. Performance Features • High particle removal efficiency • Extremely low particle shedding • Faster moisture dry down • Low ΔP • Lower cost of ownership • Reduce downtime • Reduce gas costs • Reduce maintenance • Reduce inventory • Competitive price • In-line and surface mount configurations

  8. SCF Series FiltersProduct Line

  9. Product Line Inline Filters • Max. flow rates: • 30, 225, 600, 900 and 2700 std L/min. • End connections • ¼, ½, ¾ inch integral male VCR and ¼ inch female VCR face seal fittings • Lengths: • 3.31, 5.00, 11.22 in. (84.1, 127,and 285 mm)

  10. Product Line Modular surface mount filters • Max. Flow rates: • 7, 30, 100 std L/min. • Surface mount design • SEMI PR3.1 compliant • Gaskets: C-rings and spring energized C-ring • Compatible with Swagelok IGC™ll integrated gas system

  11. Ultrahigh-Purity Filters SCF Series

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