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A 3D Micromixer Fabrication With Dry Film Resist

A 3D Micromixer Fabrication With Dry Film Resist. A.D. Radadia 1 , L. Cao 1 , H.K. Jeong 1 , M.A. Shannon 2 , R.I. Masel 1

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A 3D Micromixer Fabrication With Dry Film Resist

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  1. A 3D Micromixer Fabrication With Dry Film Resist A.D. Radadia1, L. Cao1, H.K. Jeong1, M.A. Shannon2, R.I. Masel1 1Department of Chemical and Biomolecular Engineering, 2Department of Mechanical Science and Engineering,University of Illinois at Urbana-Champaign, USA MEMS 2007 pp.361~364 Advisor：Cheng-Hsien Liu Reporter：Yu-Sheng Lin Date：2007/04/18

  2. Outline • Introduction • Fabrication • Micro-mixer design • Results • Conclusions

  3. Introduction DFR：Dry Film Resist

  4. Fabrication

  5. Micro-mixer Design 6 layers

  6. Compare of wet etching and RIE

  7. Results

  8. Microscopic images of (a) 4 patterned layers (b) 6 patterned layers and a cap layer Microscopic images during process

  9. Conclusions • A technique utilizing by dry film resist to build 3D microstructures with 6 layers patterned has been developed. • Dry film resist is available in bio-compatible format. • Future work will focus on building MEMS devices for biosensing applications.

  10. Thank you for your attention !

  11. Woodpile structure 3 layers

  12. Ref: M.S. Munson, P. Yager, Analytica Chimica ACTA, 2003 pp.63~71

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