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EDAX on the XL-30

Tutorial #3 Introduction to Using the X-ray Analysis Program. EDAX on the XL-30. Remember Purpose.

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EDAX on the XL-30

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  1. Tutorial #3 Introduction to Using the X-ray Analysis Program EDAX on the XL-30

  2. Remember Purpose • Purpose of these tutorials is to enable the user to understand the basics of OPERATING the XL-30 to obtain Secondary Electron and Back Scattered Electron Images, and to obtain an Energy Dispersive X-Ray Spectrum. • Very little theory is given. • If the user’s requirements demand further instruction, he or she should seek further formal instruction.

  3. Assumptions • This tutorial assumes that you have reviewed the previous tutorials; • That you are familiar with and competent to use the XL-30 SEM; • You have a sample loaded in the SEM chamber; • You have the SEM operational.

  4. Working Distance for EDS • The optimum analytical working distance is 10 mm. This means that you sample should be in focus at a 10 mm working distance.

  5. Start the EDS (DX) program • Always start the XL-30 microscope control program before the EDS program

  6. eDX Opening Screen

  7. Collect a spectrum • Place the beam where you want to collect of spectrum. • If it is from a spot you will need to use spot mode in the Microscope Control. • I find it easier to control the beam using the XL-30 microscope control program than to try to control the beam from the eDX program. • If you want to scan an area to collect a spectrum, scan on the area you wish to collect from.

  8. Start the Collection

  9. Stop the Collection

  10. Identifying the Peaks

  11. Quantify Results

  12. Menus and Buttons • The next slides will give a quick overview of the menus and buttons on the graphic interface. • REMEMBER – IF YOU NEED MORE INFORMATION START WITH THE HELP FILES.

  13. File Menu

  14. Edit Menu

  15. View Menu No. 1

  16. View Menu No. 2

  17. Qual Menu

  18. Quant Menu

  19. Proc Menu

  20. Auto Menu

  21. Setup Menu

  22. Options, Window, and Help Menus • There is only one option – SEM • Windows menu is self explanetory. • Help Menu – see this for more information.

  23. Window Menu

  24. Help Menu

  25. Icons

  26. Peak ID Page

  27. Quantify Page

  28. Microscope Control Page

  29. That’s all • You are less likely to use the other pages, but feel free to explore. • To start, I suggest that you analyze some samples that you know the composition. That way you can tell if you have a problemor not.

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