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iPartner ™ Support Offerings . . . Partnering for reduced cost and higher uptime

iPartner ™ Support Offerings . . . Partnering for reduced cost and higher uptime. iPartner. KLA-Tencor, the premier company in yield management, introduces a breakthrough in semiconductor customer support. iPartner. iPartner …

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iPartner ™ Support Offerings . . . Partnering for reduced cost and higher uptime

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  1. iPartner™Support Offerings. . . Partnering for reduced cost and higher uptime C O N F I D E N T I A L

  2. iPartner KLA-Tencor, the premier company in yield management, introduces a breakthrough in semiconductor customer support C O N F I D E N T I A L

  3. iPartner iPartner … . . .A unique relationship between customers and KLA-Tencor onsite and online resources. . . . A partnership that allows our customers to tailor their support level to match their specific manufacturing requirements. C O N F I D E N T I A L

  4. iPartner iPartner New service offerings from KLA-Tencor for your iSupport-compatible systems With KLA-Tencor as your support partner, you’llcut your costs and improve tool uptime. C O N F I D E N T I A L

  5. iPartner: Advantages What’s in it for you? • Reduced cost, higher uptime • A choice of online/onsite support solutions • Pick the one that matches your requirements • Go online 7x24 for fast response and rapid resolution • Get faster onsite resolution for more complex issues • Realize immediate savings C O N F I D E N T I A L

  6. 7 x 24 Online Support Complex Tools/Critical Applications Optimizes Tool Performance Reduces Cost and Increases Uptime i724 Balances Cost and Performance Saves More through Shared Responsibility iValue iPerformance Less Critical Applications iShare Highest Performance Lowest Cost iPartnerSupport Offerings C O N F I D E N T I A L

  7. 7x24 round-the-clock online service iPartner: How it Works iPartnerofferings are based on a unique partnership among KLA-Tencor Online Support Center (OSC) engineers, K-T’s customer support engineers and your engineers • Increased coverage, faster response • Common issues are quickly resolved (e.g. lockups, alignment errors, calibrations, etc.), reducing the need for onsite dispatch • Fast resolution, shared savings • Complex issues are assisted via online diagnostics and parts ordering, reducing onsite MTTR • Reduced downtime C O N F I D E N T I A L

  8. Comparison to Conventional Support i724 Reduces Costs, Provides More Coverage, and Resolves Problems Faster Feature Full i724 Onsite Support Coverage 5x8 5x8 Off-shift Support Coverage Uplift 7x24 Online < 2 hrs Online Response Time 4 covered hrs Onsite 4 covered hrs Onsite Online Parts Diagnosis & Ordering No 7x24 Cost Savings No Yes Remote Operation, Data Transfer, No Yes E-10 Reporting Standard Minus Saver Standard Price Awards C O N F I D E N T I A L

  9. iPartner: Cost Saving Benefits Using 24x7 online support reduces onsite costs • We share the savings with you • Savings depends upon the following • Number of compatible tools • OSC utilization • Whether or not you have an iDM server C O N F I D E N T I A L

  10. iPartnerSaver Awards • For example, your fab with $XM service entitlement: • KLA-Tencor will pay for installing, licensing and maintaining the iDM • We will pay for the license fees of connected tools • We will provide 7x24 online support • We share savings after paying for the license and maintaining the server if you meet the online usage target • Expected annual saving up to $XXXXX Savings Apply Toward OSC Usage iPartner Offering iPartner Offerings Targets 85 to 89% Neutral iPerformance i724 iValue 90 to 94% $YYYYY 95% or More $ZZZZZ C O N F I D E N T I A L

  11. iPartner: Longer-term Benefits No more “one-cost fits all” support solution • iPartner support offerings are extremely flexible • Support is scaled to match your specific requirements • How complex are your KLA-Tencor tools? • How critical are your applications? • Where are you in the production cycle? • What is your level of maintenance expertise? • Over time, your requirements may change • Transition to lower-cost iPartner offering C O N F I D E N T I A L

  12. iPartner: Longer-term Benefits • Tool health monitoring • System optimization service • Intra-fab remote tool operation Future features will further reduce downtime and improve productivity C O N F I D E N T I A L

  13. Jul-02 Support Element i724 iValue iShare Online Support Center Online Coverage 7x24 7x24 7x24 Online Response 2 hr. 4 hr. 4 hr. Parts Diagnosis & Ordering 7x24 7x24 7x24    Case Tracking Onsite Support Coverage Period 5x8* 5x8* 5x8*   8 visits (includes Repair Labor 1 annual PM visit) Tool Down Response (avg.after working on-line) 4 covered hr 8 covered hr 8 covered hr 16 or 24 covered 16 to 24 covered On-site Response -varies by Product 4 or 8 covered hr hr hr   Preventive Maintenance By Customer Extended Onsite Coverage Optional Optional Optional Parts    Repair Parts    Consumables Stocking Locations Local Local Local * 7x8 at select hubs All programs and options may not be available for all locations. Please consult your local service manager. iPartnerSupport Offerings at a Glance C O N F I D E N T I A L

  14. iPartner - Availability iPartner™ Service Offerings Availability iPerformance iValue iShare i724 iDM Compatible tools 2350 l l l l l l 213X NT AIT2,3 l l l l ASET F5X l l l l Archer 10 l l l l SP1 l l l l 5XXX XP l l l l l Available Q3’CY02 l Available Q4’CY02 C O N F I D E N T I A L

  15. iPartner:Current Customers • Beta tested at major semiconductor manufacturers in North America • iSupport technology widely accepted … • 20+ customer sites with iDM servers in US, Europe, Taiwan, Japan and Korea • More than 200 tools connected to online support C O N F I D E N T I A L

  16. iPartner Make KLA-Tencor your support partner Cut your costs and improve tool uptime “It’s simply a better way of doing business” C O N F I D E N T I A L

  17. Back up C O N F I D E N T I A L

  18. SP1_TBI Systems Maintainability Metrics 14 12 10 8 Hours 6 Beta Engagement 6.0 4 MTTR 2 0 Jul-01 Sep-01 Nov-01 Jan-02 Mar-02 May-02 iPartner: Beta Results Demonstrated MTTR Reduction From 10 to 6 hours Increased Uptime and Reduced Onsite Repair 97% Availability – Customer data C O N F I D E N T I A L

  19. Price Comparison Example (US) iValue Reduces Costs, Provides More Coverage, and Resolves Problems Faster Tool Type # of Tools Basic iValue 2139 10 $111 $111 AIT II with ADC 10 $105 $105 SP1-TBI 2 $36 $36 Archer 10 2 $42 $42 iPartner Saver Awards NA None -$40 Discount* Total Discounted Price 24 $1,985 $1,945 C O N F I D E N T I A L

  20. iPartner Comprehensive Offerings • 7 x 8 onsite support • 4 covered hour onsite response • 7 x 24 online support • Remote support • Parts diagnosis & ordering • 1 hour priority online response • All parts and labor for PM and repair • Priority escalation • Hardware and software revisions • Optional onsite off-shift support iPerformance (Q4CY02) Optimizes Tool Performance C O N F I D E N T I A L

  21. iPartner Comprehensive Offerings i724 Reduces Cost and Increases Uptime • 5 x 8 onsite support (7 x 8 at select hubs) • Onsite response (after working online) • 4 covered hours on average for tool-down cases • 4 or 8 covered hours for non-tool down cases • 7 x 24 online support • Remote support • Parts diagnosis & ordering • 2 hour online response • All parts and labor for PM and repair • Hardware and software revisions • Optional onsite off-shift support available C O N F I D E N T I A L

  22. iPartner Value Offerings iValue Balances Cost and Performance • 5 x 8 onsite coverage (7 x 8 at select hubs) • Onsite response (after working online) • 4 covered hours on average for tool-down cases • 4 or 8 covered hours for non-tool down cases • 7 x 24 online support • Remote support • Parts diagnosis & ordering • 4 hour online response • All parts and labor for PM and repair • Hardware and software revisions • Optional onsite off-shift support available C O N F I D E N T I A L

  23. iPartner Value Offerings iShare Saves More Through Shared Responsibility • Your engineers perform PMs, calibrations and first level diagnostics • 8 K-T onsite visits annually (including one PM visit) • 5 x 8 onsite coverage (7 x 8 at select hubs) • Onsite response (after working online) • 4 or 4 covered hours on average for tool downcases • 8 covered hours for non-tool down cases • 7 x 24 online support • Remote support • Parts diagnosis & ordering • 4 hour online response • All parts for PM and repair; you order authorized parts through OSC • On-going skill and PM verification • Service bulletins & special purchasable tooling • Hardware and software revisions C O N F I D E N T I A L

  24. iPartnerSaver Awards Example • For example, a fab with $2M service entitlement: • KLA-Tencor will pay for installing, licensing and maintaining the iDM • We will pay for the license fees of connected tools • We will provide 7x24 online support • We share savings after paying for the license and maintaining the server • Expected annual saving up to $40,000 Savings Apply Toward OSC Utilization iPartner Offering iPartner Offerings Targets 85 to 89% Neutral iPerformance i724 iValue 90 to 94% $15,000 95% or More $40,000 C O N F I D E N T I A L

  25. Clarify Data Case History Summary Report Onsite CSE Date / Time minus Case Open Date / Time Percentage Cases Opened prior to CSE onsite plus remote resolution, over all cases Chart Product Family Performance. Chart Overall Performance Chart 3 month rolling average Targets 3 month rolling average over either: 85%, 90% or 95% Utilization Metric - iPartner C O N F I D E N T I A L

  26. Price Comparison Example (US) i724 Reduces Costs, Provides More Coverage, and Resolves Problems Faster Tool Type # of Tools Full i724 2139 10 $121 $121 AIT II with ADC 10 $116 $116 SP1-TBI 2 $39 $39 Archer 10 2 $47 $47 iPartner Saver Awards NA None -$40 Discount* Total Discounted Price 24 $2,177 $2,137 C O N F I D E N T I A L

  27. Price Comparison Example (US) iValue Reduces Costs, Provides More Coverage, and Resolves Problems Faster Tool Type # of Tools Basic iValue 2139 10 $111 $111 AIT II with ADC 10 $105 $105 SP1-TBI 2 $36 $36 Archer 10 2 $42 $42 iPartner Saver Awards NA None -$40 Discount* Total Discounted Price 24 $1,985 $1,945 C O N F I D E N T I A L

  28. iPartnerRoadmap V 2.0 (July ’02) V 2.7 (2H’02) V 3.0 (Q2CY03) • 2350 (V8.0.66) • AIT III(V5.0.15SP4) • SP1-TBI (V3.5.2304) • ADC (2.0.17NT)** • 8X00 (4.0P2 NT) • F5x (V2.6) • Archer 10 (V1.1*4) • 5xxxXP (V14.6) • i724, iValue and iShare • 7x24 Online Support • 7x24 Parts Diagnosis & Ordering • Worldwide VPN • Service Request from iDM Browser • Remote Operation, data transfer • E-10 Reporting • Previous Tools Plus: • CRS 3000 • Quantox • Others TBD • Expanded architecture to connect 75 tools • Configurable reporting engine • Simplified User Administration • Improved Metric reporting with SPC • VoIP • Previous Tools Plus Next Generation: • 2370 • SP1-DLS & Next Generation • AIT XP • Remote Support Only • 2401/Viper • eS20XP • TeraStar • ADC Manager • iPerformance • Tool Health Monitoring and Reporting • System Optimization Service • Multi-Language Translation Support • Unix OS Support • Intra-fab Remote Operation (on selected products) • Data Table Viewer and export • Supported • Tools • iPartner • Offerings • and • Features • iDM • Features ** = Remote Support Only C O N F I D E N T I A L

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