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Floating Gate Devices. Kyle Craig. Flash Memory Cells – An overview Paolo Pavan, Roberto Bez, Piero Olivo and Enrico Zanoni. Motivation!. Predicted Worldwide Memory Market Flash prediction, 6% of total memory market….
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Floating Gate Devices Kyle Craig
Flash Memory Cells – An overview • Paolo Pavan, Roberto Bez, Piero Olivo and Enrico Zanoni
Motivation! • Predicted Worldwide Memory Market • Flash prediction, 6% of total memory market…
According to Gartner Research in 2006 flash consisted of 33% of the market
FGMOSFET • If a charge can be forced onto the floating gate, it will remain there. • Charge on the floating gate shifts the VT of the device • Two VT device
By having two VTs depending on the charge of the floating gate, device can be used as a memory. • No charge on floating gate = logic 1 • Charge on floating gate = logic 0
Hot Electron Injection • Electrons travel laterally from source to drain with applied voltage. Voltage on gate gives enough energy to inject through the thin oxide onto the floating gate • Three principles • “lucky” enough to gain enough energy • No collisions in substrate • No collisions in oxide
Fowler Nordheim Tunneling • With an applied electric field, electrons are able to tunnel through the oxide. • The thicker the oxide, the greater the applied voltage needs to be • 10nm oxide is considered standard • Variation in this oxide will lead to wide distribution of VT values
Side effects • HEI and FN Tunneling can lead to charge being trapped in the oxide • Change in the VTs of the device • Inability to add or remove charge from floating gate
Flash Memory: Programming • Assumed device starts with no charge on the floating gate i.e., storing a “1” • Use HEI to put charge onto floating gate • Shifts VT of device • Depends on: • Channel Length, Time, Temp, drain voltage
Flash Memory: Erasing • Use Fowler-Nordheim Tunneling to pull electrons off of floating gate to the source • Depends on: • Oxide thickness, applied voltage • Need to worry about breakdown of the source/substrate junction • Limits Scaling!
Program, Erase, Read Typical Values: Vcc = 5V Vpp = 12V Vdd = 5V Vread= 1V
Programming Disturbs • Gate Disturbs – Cells not selected with active WL • DC Erasing • If cell has charge store on it, electrons can tunnel from the FG to the Control Gate • DC Programming • If the cell has no charge on it, electrons can tunnel from the substrate to the FG
Programming Disturbs • Drain Disturbs • Electrons can tunnel from the FG to the drain • Holes generated by impact-ionization in substrate then injected into FG • Lowers the high VT value
Retention/Endurance • Retention: Change in charge on FG • Intrinsic: field-assisted electron emission, thermionic emission • Extrinsic: Oxide defects, Ionic contamination • Endurance: Change in threshold values based on number of cycles
Scaling • Issues with scaling • Decreasing L will increase performance but also increase number of disturbs • Physical voltage constraints • 3.2 eV energy barrier and 8-9MV/cm for FN • Oxide thickness limit
NOR vs NAND • NOR similar in structure to SRAM • NAND more comparable to Harddrives
A 6V Embedded 90nm Silicon Nanocrystal Nonvolatile Memory • R. Muralidhar, R.F. Steimle, M. Sadd, R.Rao, C.T. Swift, E.J. Prinz, J. Yater, L. Grieve, K. Harber, B. Hradsky, S. Straub, B. Acred, W. Paulson, W. Chen, L. Parker, S.G.H. Anderson, M. Rossow, T. Merchant, M. Paransky, T. Huynh, D. Hadad, KO-Min Chang, and B.E. White Jr.
Motivation • Scaling of conventional floating gate memories is limited due to high voltages that are needed • Use of Silicon Nanocrystals has some benefits over floating gate • Immune to oxide defects during program/erase • Reduction of oxide thickness • Reduction of operating voltage
Replaces floating gate of traditional cell with discrete Nanocrystal particles • Produced using a conventional CMOS process flow with only 4 additional masks compared to logic Control Gate
Current Characteristics • Two Bits/cell operation is possible with proper nanocyrstal isolation • Without needed isolation functions like a normal FG
Can be erased from the top oxide (between FG and control gate) or the bottom oxide (between nanocrystals and substrate) • Erasing through the top oxide produces lower VT
Cycling on VT • After cycling 1000 cycles Erase and Program VTs maintain tight distribution.
Summary • Produced in 90nm .25um technology • Operation voltages 6V • 90% yield on 4 MB array