Optics in micromanufacturing

1. Optics in micromanufacturing Prof. Yong-Gu Lee Email: lygu@gist.ac.kr Phone: 062-715-2396 Course web site: https://210.107.176.1/wiki/pages/V0b5M5F/optics_in_micromanufacturing.html Password for protected zip files: xxxx

2. Motivation • Silicon manufacturing was a great success leading to integrated circuits, sensors (ex: gyroscopes, accelerometers), actuators (ex: DMD) • Normally, manufacturing is done in batch processes without visual monitoring • Optics allows real time monitoring of objects comparable to the wavelength of light (400nm~800nm) • Sophisticated sensing, manipulation and manufacturing can be realized using optics

3. Micromanufacturing, micromanipulation and sensing Sun et al, Elastic force analysis of functional polymer submicron oscillators, Appl. Phys. Lett. 79, 3173 (2001); http://dx.doi.org/10.1063/1.1418024

4. Course Outline • Optics is an important subject in manufacturing micrometer scale devices and sensors. The goal of this course is to learn practices and the theory of optics used in micromanufacturing. Firstly, microscopy is covered as it is the basic tool used in examining micromanufacturing processes. Secondly, actuated stages and cameras used in advanced microscopes are covered. Thirdly, techniques for introducing lasers into microscopes and steering the laser and measuring the scattering of laser from particles are covered. Lastly, applications that utilize the instruments and theory covered in the courses are covered that include optical tweezers and microsterolithography. Special emphasis will be given to optical tweezers theory and understanding the underlying physics. Advanced research topic of single molecule trapping using optics tweezers will also be covered.

5. Course focus • Light microscopy (1 week) • Brightfield microscopy • Fluorescencemicroscopy • Microscope stages (1 week) • Motorized stages • Piezo stages • Linear displacement sensors • SW control • Microscope image acquisition (1 week) • CCD, CMOS cameras • SW control • Laser steering in microscope (1 week) • Laser safety • Tilt mirrors • Spatial light modulators • SW control • Laser scattering in microscope (2 weeks) • Theory • Quadrant Photo Diodes • SW control • Force measurements (2 weeks) • Particle tracking • Optical Tweezers and Trap stiffness • Fluid force calculation using FEM methods • Mid term examination (1 week) • Microstereolithorgraphy (1 week) • Optical force calculations (2 weeks) • Ray-optics model • Rayleigh regime • Numerical methods (FDTD) • Single molecule trapping (3 weeks) • Plasmonictweezer • Introduction to DNA • DNA trapping • DNA sorting • Final examination (1 week)

6. Syllabus

7. Understandings • Grades • Assignments 10 • Term project30 • Mid exam 20 • Final exam 30 • Class attendance 10 • _____________________ • 100 • A,B,C,F • A ~40% • B ~40% • C,F ~20% • *Subject to change If you fail to attend more than 1/3 of the classes, you disqualify for taking any examinations further scheduled. Regulations on Courses, ART 25 (3)

8. Understandings • Attendance • No excuses for absence • Business trip • Sick • Attendance credit • Not to be later than 15 minutes • No early leave • Assignments • Penalties for late submissions • No credit for copied submissions,(original and copies)