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MEMS : The Natural Expansion of Analog Mixed Signal Technologies

MEMS : The Natural Expansion of Analog Mixed Signal Technologies. Digital ICs. Analog ICs. RF ICs. MEMS. High-Volume. High-Value. Technologies. Technologies. RF MEMS device. Applications / Advantage. RF-Switches (electrostatic). Band-Switches, duplexer-Switches, Bypass-Switches

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MEMS : The Natural Expansion of Analog Mixed Signal Technologies

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  1. MEMS : The Natural Expansion of Analog Mixed Signal Technologies Digital ICs Analog ICs RF ICs MEMS High-Volume High-Value Technologies Technologies

  2. RF MEMS device Applications / Advantage RF-Switches (electrostatic) Band-Switches, duplexer-Switches, Bypass-Switches No static power consumption, low loss and signal distortion Micro-mechanical Resonators Duplexer-Filters, RX&TX-Bandfilters, GPS-filters, VCOs Small size, RF-System-On-Chip capability High-Q Inductors Matching components, Baluns, VCOs Improved Q-value for On-Chip Inductors Tunable Capacitors VCOs, tunable Filters Improved Q-value and tuning range for On-Chip Varactors RF MEMS for Mobile PhonesRF-front-end

  3. Technical Challenges • Compatibility of the MEMS process with active circuitry processing is critical for the realization of integrated MEMS • Same process for the manufacturing of all RF-MEMS components • Possibility to use different foundries

  4. Thick Copper Inductor on Top of IC Low Temperature Process Q > 80 @ 2 GHz Technology in Production Above-IC High-Q Inductors

  5. Packaging Issues • Size (and cost) is important in wireless as it is a consumer market • Monolithic integration allows miniaturization and system integration • However, MEMS usually requires specific packaging which may justify stand alone packages

  6. Thick Copper on Quartz The IC chip and the inductor are connected by a Telecom-specific Flip-Chip Technology reoriented to SMD packaging 30 25 20 15 10 5 0 Q L L (nH) and Q 0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6 1.8 2 Frequency (GHz) SMD High-Q inductors

  7. MEMS Components Inductive Loads, Variable Capacitors, Relays/Switches, Mechanical Filters, Transformers, etc. Integrated with Amplifiers (LNA, PA), Oscillators (VCO), Mixers, Filters, etc. Up to Complete and Highly Integrated Radio Systems ! MEMS for Wireless

  8. Wireless Libraries : MEMS Comm • RF-MEMS Library of Components • - Characterized Set Of Inductors, Variable Capacitors, Relays / Switches, etc. • - Automatic Components Generators • Available through major design environments (Agilent, Cadence, Mentor Graphics)

  9. Intrinsic part of the inductor Coplanar port ports port PHS-MEMS FEM - EMXD Metal Wireless Design Tools • Memscap’s RF Engineering Platform • - Cross-Section Viewer, 3-D Viewer, Customized DRC, LVS, GDS Generators … • - Interfaces To a Dedicated RF Finite Elements Method Solver

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