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2012 Spring ITRS Environmental/ Safety/ Health Work Group Noordwijk, the Netherlands

2012 Spring ITRS Environmental/ Safety/ Health Work Group Noordwijk, the Netherlands. Francesca Illuzzi (Micron), Harry Thewisson (NXP) Steve Moffat (AMAT), Shane Harte (ESIA) Nausikaa Van Hoornick (IMEC), Leo Kenny (Intel) April 24, 2012 . EHS Team and Engagement. Dan Herr – UNCG

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2012 Spring ITRS Environmental/ Safety/ Health Work Group Noordwijk, the Netherlands

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  1. 2012 Spring ITRSEnvironmental/ Safety/ Health Work Group Noordwijk, the Netherlands Francesca Illuzzi (Micron), Harry Thewisson (NXP) Steve Moffat (AMAT), Shane Harte (ESIA) Nausikaa Van Hoornick (IMEC), Leo Kenny (Intel) April 24, 2012

  2. EHS Team and Engagement • Dan Herr – UNCG • Mike Garner - Stanford Univ. • Gopal Rao – Intel • Andreas Neuber – AMAT • Chris Lee – TI • Harry Thewisson (NXP) • Shane Harte (ESIA) • Nausikaa Van Hoornick (IMEC) EHS TWG Team: • Seung Jong Ko – Hynix • FM Hsu – TSMC • Joey Liu - ITRI • Francesca Illuzzi – Micron • Hans-Peter Bipp –Infineon • Steve Moffat – AMAT • His-An Kwong – SEMATECH • Leo Kenny – Intel • Reed Content – GLOBALFOUNDRIES • Terry Francis – Matheson • Laurie Beu – SEMATECH • Walter Worth - SEMATECH TWG Engagement: • Assembly & Packaging • Interconnect • Factory Integration • Emerging Research Materials (and Metrology) • Front end processing • Lithography Special workshop focus: • Energy and Sustainability (with FI) • Green/Sustainable Chemistry (with ERM)

  3. EHS Team and Engagement • Proactive technology solutions for addressing future global regulatory requirements • Sustainable/Green Chemistry integration with Technical WG partners • ERM and ESH to draft methodology and Green Chemistry White Paper (July 2012) • Energy (energy metrics and green fab definition) with FI TWG • 450 transition (plan for driving ESH innovation and improvements), summer • Nano material research guidance, metrics • Continue to strengthen connections adjacent consortia, industries and associations (WSC, SEMI standards, INEMI, Asia regulatory framework) • Advanced Metrology R&D guidance (capability assessment for ESH) • Improve education and communication of ESH roadmap vision • MtM (sensor/device application to ESH) • Roadmap integration with iNEMI (product content; consistency on energy metrics) • Challenges of recycling (cost, feasibility); GC, 450 implications • Look Ahead: • WP for green chemistry integration • Sub team follow-up engagement

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