1 / 7

2012 Litho ITRS Update

2012 Litho ITRS Update. Lithography TWG July 2012. Outline. Lithography Potential Solutions Major Challenges Some table updates. Litho Team (2012 Meeting attendees shown – there are many other contributors). Updated MPU/DRAM Options. Updated Flash Options.

ady
Download Presentation

2012 Litho ITRS Update

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. 2012 Litho ITRS Update Lithography TWG July 2012

  2. Outline • Lithography Potential Solutions • Major Challenges • Some table updates

  3. Litho Team(2012 Meeting attendees shown – there are many other contributors)

  4. Updated MPU/DRAM Options

  5. Updated Flash Options This table shows the requirements for 2-D flash development. The potential introduction of 3-D flash does not drive lithography.

  6. Updated Challenges

  7. Highlighted Table Changes • We will create a lithographic materials challenges table and work jointly with ERM group on these needs • Multiple patterning table will be changed to reflect typical industry pitch splitting practice. • Will start assessing DSA capabilities to meet litho roadmap requirements

More Related