Steve Franz Technical Director of ISNC Lab Manager, NRF

1. Integrated Systems Nanofabrication Cleanroom Overview Steve Franz Technical Director of ISNCLab Manager, NRF

2. Integrated Systems Nanofabrication Cleanroom Overview Pronounced ī-sink Steve Franz Technical Director of ISNCLab Manager, NRF

3. ISNC Objectives • Provide a state-of-the-art nanofabrication facility that is • Open to all UCLA and academic researchers • Available to Industry and Government users • Is professionally managed and safe • Keeps current in new process techniques and latest equipment • Support CNSI’s broader mission • Complement and support other CNSI Cores and UCLA labs eg NRF • Provide mentoring opportunities • Scientists, students and teachers • Work with industry and government to provide more and better jobs and the educated work force to fill them

4. ISNC Clean Room Layout Occupies entire A level Clean Room Space (~9700 sq. ft.) Class 100 – Yellow Bays- 2750 sq ft Class 1000-700 sq ft support space Dedicated service chases Class 1000 – White Bays- 6250 sq ft 6 Bays for standard processing equipment 2 Bays are Bio-suites with separate negative air flow

5. ISNC Clean Room Facilities • Bulk high purity N2 system with point-of-use purification • High Purity DI water loop (18 Meg ohm cm) • Regular and scrubbed exhaust • Low vibration flooring (<< Class D 250 micro inches per sec) • Waste neutralization system (End of year) • Electrical single and 3 phase (120, 208, 480V) throughout • lab with low noise grounds at selected locations • Remote gas room for toxic and reactive gas storage • Complete utility drops in each chase October 6, 2010

6. ISNC Staffing & NRF Support Engineers

7. Lab Operations • Staffed Hours of Operation • M-F, 8 AM to 10 PM • Some operations allowed only during staff hours • Yearly recertification planned (online) • Buddy system always in effect • Responsible Engineer List with backup for each equipment online and at tool. • Lab Rules and Etiquette • Spelled out in Lab Manual, at Orientation and at Walkthru • Periodic Lab Cleanups need participation of all users • Quarterly user meetings to improve Lab Operations • Periodic faculty user meetings for strategic planning

8. Lab Management System • Information & documents (Web Based) • http://www.isnc.cnsi.ucla.edu • Lab Manual, • Equipment Specs, • Forms and applications, • Orientation notes, • Calendar, • Contact info, • Important links (http://www.cnsi.ucla.edu, http://www.nanolab.ucla.edu) • Announcements and inter-user communication (Email) • isnc-users@lists.ucla.edu October 6, 2010

9. Lab Management System www.isnc.cnsi.ucla.edu

10. Lab Management System • Lab Access • Badge readers for lab entry and exit • Records time inside cleanroom • Equipment Access & Tracking • Touch-Screen Terminals with interlock box on major equipment • Activate and de-activate equipment • Record time equipment used • Log books to record equipment-specific data

11. Lab Management System Cleanroom Entrance Badge Reader Green Light When Door is Unlocked Badge Reader CNSI badges must be programmed for ISNC entry Tacky Mat

12. Lab Management System • Equipment Use • Must be trained and authorized • Must reserve equipment if wanted at a specific time • Must log into terminal to begin use • Terminal software tracks time of use • Must fill out dedicated log book at start and end of each use • In some cases staff can run for you (eg for one time need) • Terminals in main aisle throughout lab • Terminals show equipment in use and users in the lab • Major equipment will be hardware interlocked by end of year

13. Lab Management System • Custom Lab Management software • Requires account for each new user • Tracks lab and equipment use • Manages and tracks training • Reserves equipment • Provides detailed info on equipment and users • Calendar for lab events • Admin level for reports, controlling access etc • Phones & Paging System • 7 telephones in cleanroom and 2 in corridor • Paging can be used for local evacuation and can be done from office

14. Lab Management System http://lr.isnc.cnsi.ucla.edu

15. Laboratory ChargesTwo-Tiered Rate Structure Academic Rate Non-Academic Rate Higher Rate Monthly minimum Industry & Government Labs • Lower Rate • No monthly minimum • Faculty & Graduate Students • Undergraduate students • Professor support and ISNC approval required • Collaborators with Faculty • UCLA PI & ISNC authorization required

16. Becoming an ISNC Member • Apply online for account • http://clms.cnsi.ucla.edu/cnsi/clms/request-account • Download New User Application • Download Project Form • Sign up and attend 1st orientation meeting • Held every 4th Friday of month • Limited to 15 new users per month • Submit New User Application & Project Form • Pay $100 non-refundable new user fee for startup kit • Study User Guide • Take Online Safety Test • http://www.isnc.cnsi.ucla.edu/test • Attend Lab walkthru (usually week after orientation)

17. New User Startup • Storage • Individual locker with locks inside cleanroom • Day-use lockers outside of cleanroom • Coat rack outside of cleanroom • New User Startup Kit • Tool Box • Tweezers • Cleanroom Notebook & Pen • Cleanroom Paper (100 Sheets) • Safety Glasses

18. New User Training • Training takes time; Plan ahead and be patient • Training is done by staff and superusers, experienced users authorized to train others. • Training is done to a written procedure (specs) which are also online and at the respective tool. • New users signup for specific training and are put on a wait list. • Training coordinator emails people on wait list to set up training time. • Training is done first come, first served except superusers are given preference. • Training is held monthly for most equipment in small groups (5-7 people). • Complex equipment eg SEM, Stepper etc require a 2nd , certification step with staff or superuser. • After authorization, trained user can reserve equipment and use machine alone. • Superusers receive training credits equal to lab and equipment charges. October 6, 2010

19. Auxiliary Processing • NRF • LPCVD & PECVD Deposition processes • Poly Si doped & undoped • Si3N4 Stnd and low stress • Low Temp Oxide Phos Doped & Undoped • Amorphous Si • Poly or amorphous silicon, Si oxide, • Deep (>2 micron) Si and Ox etches • Special metrology eg EDX, optical profiler, film stress • Lapping and polishing (Si, GaAs, glass etc) • FEI Nova 600 Focused Ion Beam • TEM sample prep • Medical scalpel • IC repair • Nano etch • Mask shop

20. Auxiliary Processing • HSSEAS CHFE Lab • Wafer dicing and sawing • Wire bonding • High Resolution Plotter for Mask Fabrication and Circuit Layout • High Frequency Test Equipment Rental

21. Acknowledgements • UCLA leadership • CNSI administration • Prof Paul Weiss,Director of the CNSI • Profs Kang Wang, Lenny Rome, Associate Directors of the CNSI • Susan Rubin, Managing Director of the CNSI and her staff • HSSEAS School of Engineering and Dean V.K. Dhir • Electrical Engineering Dept and Prof Frank Chang

22. Acknowledgements • ISNC staff • Krissy Do, Dr Yuwei Fan, Ghassan Malek, Dr Brian Matthews, Adriane Nolan, Dr. Da Teng, Lorna Tokunaga, Tony Wright • NRF Staff • Noah Bodzin, Huynh Do, Max Ho, Jamie Kahng, Tom Lee, Dr Wilson Lin, Hoc Ngo, Mo Shahangian, Joe Zendejas • Lab Beta Testers • SEAS Shops Services October 6, 2010

23. Acknowledgements Special thanks to our industry partners and donators:

24. Thank You