μ MS ³ μ M odular S ubstrate S ampling S ystem

2. μMS³μModular Substrate Sampling System

3. μMS³ Presentation • Product Description • Building Block Simplicity • Building Blocks into Systems • Features & Benefits • Specifications • Conventional to Modular Sampling Systems • Pricing Structure

4. μMS³Product Description • The μMS³System… • Designed to maximize efficiency and minimize costs • Developed specifically for the Process Analytical Instrumentation market • Incorporates a single block and tubeset architecture for simplicity • The perfect solution for most gas or liquid sample conditioning systems

5. μMS³Block & Tube Architecture Standard Flow Tubes Building Block • One Building Block for all system configurations. • Standard Flow Tubesets are pre-welded and allow for flexibility in system design. • Simple building block approach allows for assembly and/or reassembly into virtually any configuration.

6. μMS³Simple Assembly Steps

7. From Building Blocks & Tubes to Sampling System • Assembly Requirements • One tool, screw type & seal • µMS³ blocks • µMS³ prefabricated interconnecting tubesets • µMS³ standoffs. Step 1 – Determine number of components required for each flow stream. For each flow stream, assemble µMS³ blocks together using #8-32 x 7/16” Socket Head Cap Screws. No seals are required.

8. From Building Blocks & Tubes to Sampling System (cont.) Step 2 – Based on User’s flow schematic, place seal in block counter bore and attach µMS³ prefabricated tubesets to each manifold block using #8-32 x 7/16” Socket Head Cap Screws. Step 3 – Based on User’s flow schematic, place seal in block counter bore and assemble µMS³ prefabricated manifold to manifold tubesets to each flow manifold using #8-32 x 7/16” Socket Head Cap Screws.

9. From Building Blocks & Tubes to Sampling System (cont.) Step 5 – Based on User’s flow schematic, attach surface mount components to top of modular substrate using #10-32 x 7/16” Socket Head Cap Screws. Step 4 – Connect µMS³ standoffs to the bottom of each end of each modular substrate manifold using #8-32 x 7/16” Socket Head Cap Screws.

10. Tubed System Flow Schematic

11. μMS³Flow Schematic

12. μMS³ System

13. NeSSI / SP76 History/Standards • Initially Semiconductor Industry Concept • Center for Process Analytical Chemistry • Washington State University • New Sampling / Sensor Initiative (NeSSI) • Ad Hoc group of manufacturers, end users, integrators worked together to improve technology and achieve ‘Smart’ systems. • ANSI / ISA Standard 76.00.02 ( 2002 ) for Industrial and Analytical Application

14. Conventional Sampling Systems • Conventional Sampling Systems • Not Simple • Expensive to Maintain • Time Consuming to Design and Build • No Standardization; all “Black Art Designs” • Space Consuming • Size of components yields greater internal volume

15. μMS³ Sampling System • Modular Sampling System • Simple / Standard / Small / Smart (Future) • Standardization • ANSI / ISA SP76.00.02 ( 2002 ) • Ease of Maintenance • Lower Internal Volumes • External Space Savings

16. μMS³ Pricing • The µMS³ system is a ‘build to order” modular solution with pricing and availability based on customer specific design requirements and strict compliance to ANSI/ISA 76.00.02 (2002). • Component pricing is as follows: • Modular Building Blocks • Modular Tubesets • ANSI/ISA 76 Surface Mount Components