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Influence of the oxygen on the optical properties of RF-sputtered Zinco-Oxide thin films

Influence of the oxygen on the optical properties of RF-sputtered Zinco-Oxide thin films. Mariano Gioffrè (2) , Massimo Gagliardi (1) (2) , Massimo Angeloni (1) , Mario Iodice (3) , Giuseppe Coppola (1) and Ivo Rendina (1). (1)Institute for Microelectronics and Microsystems

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Influence of the oxygen on the optical properties of RF-sputtered Zinco-Oxide thin films

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  1. Influence of the oxygen on the optical properties of RF-sputtered Zinco-Oxide thin films Mariano Gioffrè(2), Massimo Gagliardi(1) (2), Massimo Angeloni(1), Mario Iodice(3), Giuseppe Coppola(1) and Ivo Rendina(1) (1)Institute for Microelectronics and Microsystems National Council of Research (IMM-CNR), Naples, Italy (2) Mediterranea University of Reggio Calabria, Italy

  2. ellipsometric model fit results ZnO Dispersion model of ZnO: Tauc-Lorentz single oscillator [4,5] immaginary part of dielectric function: real part from Kramer-Kroning relation: X2 = 0.32 References: [4] H. G. Tompkins, W. A. McGahan, "Spectroscopic Ellipsometry and Reflectometry ", Ed.John Wiley & Sons [5] G. E. Jellison and F. A. Modine, Appl. Phys. Lett. 69, 371 (1996) [6] G. E. Jellison, F.A. Modine, P. Doshi, A. Doshi, A. Rohatgi, Thin Solid Films, 313-314, 195 (1998) [7] A.R. Forouhi, I.Bloomer, Phys.Review B 34, 7018-7026 (1986) [8] A.R.Forouhi, I.Bloomer, Phys.Review B 38, 1865-1874 (1988) Fitting parameters: E0, Eg, A, C, e [6] Dispersion model of glass: Forouhi & Bloomer [7, 8] Fitting parameters :

  3. Refractive index sample 1 2 3 4 Eg 3.217 0.004 3.22  0.01 3.218 0.004 3.296 0.005 Sample Power (W) Temperature (0C) Flow argon (sccm) Flow oxigen (sccm) Pressure (mbar) Time (min) 1 200 50 40 10 0.02 12 2 200 50 40 6 0.02 12 3 200 50 40 3 0.02 12 4 200 50 40 0 0.02 12 Refractive index Sputtering deposition parameters The resullts of fitting parameters for sample 1 Wavelength (nm) Comparison between measured and simulated transmittance The obteined index refractive is in good agreement with literature[9,10] References: [9] E. Dumont, B. Dugnoille, S. Bienfait, Thin Solid Films, 353, 93 (1999) [10] W. L. Bond, J. Appl. Phys. 36, 1674 (1965)

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