Research Highlights of 2010

1. Research Highlights of 2010 Michael Kraft Steffen Mueller Ibrahim Sari Rachel Gleeson Kian Kiang Haitao Ding HwanjitRattanasonti Prasanna Srivisavan Bader Almutairi Carsten Gollasch Christopher Cardwell Reuben Wilcock Tess de Leon Alan Taberham Ali Alshehri Pejwaak Salimi Ioannis Zeimpekis-Karakonstantinos Mir Mokhtari

2. 3D Electrostatic Actuator • xy actuation • Alignment of optical cavity • Misalignment between fibre and spherical mirror during fabrication • z actuation • Stable and tunable optical cavity • z actuation accuracy of a few nm (fine tuning)

3. Actuator Action Suspension System Comb Drive

4. High Performance Accelerometer • Fabrication: • 60um SOI etched with DRIE • Dicing free separation and release with HF vapour etching • Allows arbitrarily large proof mass

5. Mechanical Amplifiers for MEMS • Most MEMS physical sensors rely on tiny deflections of a proof mass • The interface electronics introduces thermal noise • Introduce a mechanical amplification stage based on a mechanical lever

6. Mechanical Amplifiers for MEMS

7. MEMS Laser Target Injection System • Electromagnetic Levitation System and Railgun

8. MEMS Laser Target Injection System • Electromagnetic Levitation System and Railgun

9. Multi DoF Inertial Sensors Applications in active damping control of vibrating panels, structural health monitoring, etc In closed loop operation, the sensors allows direct velocity measurement using a ‘sky hook’ damper

10. Ion and Charged Particle Trapping • Applications in quantum computing, target injection for fusion reactors, nano particle manipulation, etc • MEMS Paul RF trap

11. MEMS Solar Concentrators lens • Thermoelectric power generation with solar light concentrators • Achieves high on-chip temperature gradients • Initial calculation shows that this could rival high performance solar cells at much lower costs. 16%efficiency simulated for a 10mmx10mm device TEG

12. MEMS DC-DC Converter • Interface from energy harvesters (vibration, solar)