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Spacer Lithography Technology

Spacer Lithography Technology. Xin Sun EE235 Presentation Feb 13, 2008. Outline. Introduction Spacer Lithography Process Discussion. IC Technology Advancement. Professor Tsu-Jae King Liu, FLCC Seminar 2006. Lithography Challenges. Continued Scaling of Feature Size Shorter wavelength

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Spacer Lithography Technology

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  1. Spacer Lithography Technology Xin Sun EE235 Presentation Feb 13, 2008

  2. Outline • Introduction • Spacer Lithography Process • Discussion

  3. IC Technology Advancement Professor Tsu-Jae King Liu, FLCC Seminar 2006

  4. Lithography Challenges • Continued Scaling of Feature Size • Shorter wavelength • Immersion lithography • Image quality • OPC • Irregularity of masks

  5. Spacer Lithography Process Yang-Kyu Choi, Ji Zhu, Jeff Grunes, Jeffrey Bokor, and Gabor. A. Somorjai, “Fabrication of Sub-10-nm Silicon Nanowire Arrays by Size Reduction Lithography,” J. Phys. Chem. B 2003, 3340-3343.

  6. Multiplication of Pattern Density 2n lines after n iterations of spacer lithography!

  7. Advantages • Sub-lithographic feature sizes • CVD film thickness determines feature size • Tighter CD control Gate formation by spacer lithography  uniform Lg Lg Gate formation by conventional lithography  non-uniform Lg Lg Y.-K. Choi et al., IEDM Technical Digest, pp. 259-262, 2002 Y.-K. Choi et al., IEEE Trans. Electron Devices, Vol. 49, p. 436, 2002

  8. Disadvantages • Several spacer lithography steps are needed to obtain different gate lengths. • Additional mask is needed. Geometrical regularity is preferred.

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