1 / 20

ESD SYSTEM OVERVIEW

ESD SYSTEM OVERVIEW. Transport rod. 1. Cu Sample. Butterfly valve. 2. Bias Sample. Sample Holder plate. Electrometer. RGA. B-A gauge. Pumping group. Filament. Conductance. Gas Injection Line. Filament Power Supply. Full Range Gauge. Bias Filament. ESD SYSTEM OVERVIEW.

mort
Download Presentation

ESD SYSTEM OVERVIEW

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. ESD SYSTEM OVERVIEW Transport rod 1 Cu Sample Butterfly valve 2 Bias Sample Sample Holder plate Electrometer RGA B-A gauge Pumping group Filament Conductance Gas Injection Line Filament Power Supply Full Range Gauge Bias Filament

  2. ESD SYSTEM OVERVIEW

  3. Cu SAMPLES

  4. Cu Samples Heat treatment Machining Cleaning ESD main steps:   

  5. Bake – out: lower part 9 8 6/11 7 1 2 3 5 10 4

  6. Bake – out: upper part 3B 2B 4B 1B

  7. RGA scans

  8. RGA scans (valve closed)

  9. Circuit 35 KV V 2-3 A A +15 V V A

  10. Degassing: 9 Cycles @ 0.35KV

  11. Degassing: 9 Cycles @ 0.70KV

  12. Degassing: 9 Cycles @ 1.5KV

  13. Calibration: H2 Calibration Factor

  14. Calibration: N2 Calibration Factor

  15. Calibration: N2 2nd set of data Calibration Factor

  16. Degassing: 30 Cycles @ 0.35 KV

  17. CURRENT!!!!!

  18. Desorption Yield

  19. Desorption Yield • 15 RGA Cycles for background Signal + biassing of the sample • 15 RGA Cycles with the filament switched on • filament + sample degassing

  20. Desorption Yield • switch on the filament • 15 RGA Cycles for background pressure • 15 RGA Cycles with the sample biased

More Related