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SEMI S10 Risk assesment changes and impact to SEMI S2 Bert Planting ASML Taskforce leader SEMI S10

SEMI S10 Risk assesment changes and impact to SEMI S2 Bert Planting ASML Taskforce leader SEMI S10. Content. Changes due to S10 and possible impact Upcoming changes of S10 Questions. Changes due to update to SEMI S10. Change:

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SEMI S10 Risk assesment changes and impact to SEMI S2 Bert Planting ASML Taskforce leader SEMI S10

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  1. SEMI S10 Risk assesment changes and impact to SEMI S2 Bert Planting ASML Taskforce leader SEMI S10

  2. Content • Changes due to S10 and possible impact • Upcoming changes of S10 • Questions Event, Venue information

  3. Changes due to update to SEMI S10 • Change: Section 5.2 : Remove definition of “Mishap” and replace by definition of “Harm” • Why: Clear definition, Mishap was not understood worldwide • Impact: - Can have major impact to likelihood of accessing the risk (see next sheet) - Changes to definitions that uses “mishap” of “Hazard”, “Likelihood”, “Risk” and “Severity” • Section 6.8.1 bullet 3:  the probability of occurrence and severity of a mishapharm Event, Venue information

  4. Change • mishap — an unplanned event or series of events that results in death, injury, occupational illness, damage to or loss of equipment or property, or environmental damage to • harm — physical injury or damage to health of people, or damage to equipment, buildings or environment. [SEMI S10] Event, Venue information

  5. Impact example of misuse of Mishap Mishap*: • A situation where the exposure to the hazard already has taken place or • A situation where exposure to a hazard is possible Situation 1 can be 1 time in 300 years while situation 2 can be 100 times a year Note*: Mirriam-Webster: Mishap: an unfortunate accident Event, Venue information

  6. Event, Venue information

  7. Related definition changes: • hazard — From: a condition that is a prerequisite to a mishap To: condition that has the potential to cause harm. • likelihood — From: the expected frequency with which a mishap will occur. Usually expressed as a rate (e.g., events per year, per product, or per substrate processed). To: the expected frequency with which harm will occur. Usually expressed as a rate (e.g., events per year, per product, or per substrate processed). • risk — From: the expected losses from a mishap, expressed in terms of severity and likelihood. To: the expected magnitude of losses from a hazard, expressed in terms of severity and likelihood. • severity — From: the extent of the worst credible loss from a mishap caused by a specific hazard. To: the extent of potential credible harm. Event, Venue information

  8. Changes made in S2 due to update to SEMI S10 Change: • Section: Note 7: change “Critical” to “Very high” for the overall risk Why • The term was changed to facilitate translation from English Impact: • None Event, Venue information

  9. Up coming proposed changes to SEMI S10 (1) Table A1-1: SEVERITY GROUPS Change • Section: Severity table S10, Harm to personnel Why • Remove the use of OSHA related because this is not world wide understood Impact • Minor Event, Venue information

  10. Up coming proposed changes to SEMI S10 (2) Table A1-: LIKELIHOOD GROUPS • Section: Risk assessment table A1.2: Likelihood definitions • Change: • Add category not reasonably foreseeable • Why • To prevent that events with a high severity but so unlikely to happen will have a Medium risk • Impact • Update to overall risk ranking table • No additional precaution to be implemented for those risk Event, Venue information

  11. Up coming proposed changes to SEMI S10 (3) • Section: Risk assessment table A1.3: Overall risk • Change: • Change risk of Frequency: “HIGH”: & Severity ”MINOR” from “MEDIUM” to “LOW” • Why • To prevent that events with a minor impact like “paper cuts” would require precautions according SEMI S2 • Impact • No additional precaution to be implemented for this risk category Event, Venue information

  12. Up coming proposed changes to SEMI S10 (4) TABLE A1-3: Overall Risk Ranking Categories: Event, Venue information

  13. Questions Event, Venue information

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