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Silicon Efficiency Tod Higinbotham George Yang

Silicon Efficiency Tod Higinbotham George Yang. Outline. Silicon Market Opportunity Silicon Flow Map Reclaim Market Opportunity Analysis RegenSi Solution RegenSi Technology vs. Traditional Reclaim Proven Value Applications The RegenSi Advantage Case Study Business Outlook. Customer.

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Silicon Efficiency Tod Higinbotham George Yang

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  1. Silicon EfficiencyTod HiginbothamGeorge Yang

  2. Outline Silicon Market Opportunity • Silicon Flow Map • Reclaim Market • Opportunity Analysis RegenSi Solution • RegenSi Technology vs. Traditional Reclaim • Proven Value • Applications • The RegenSi Advantage Case Study Business Outlook

  3. Customer Prime Wafers > Volume Production > 99.9% Product Yield Test/Monitor Wafers > Process Control > Reclaim Test Silicon Purchased $1.25 B Process Monitoring, Qualification, and Optimization Reclaim Loop + Services Purchased $0.75-$1.00 B 2-8X Wafer Cycle WASTE Wafers Disposed Due to Thinness/Damage Silicon Flow Map = Total Test Silicon Annual Market $2.00 - $2.25 B

  4. Silicon Reclaim Market 939 874 727 • Market Drivers • The risk factors for 300mm processing have caused an increase in monitor wafer usage • The shortage of silicon has kept test wafer prices high • The price differential between a new test wafer and a reclaimed test wafer establishes the opportunity cost

  5. Traditional Wafer Reclaim Issues associated with current wafer reclaim processes: • Limited wafer reclaim lifetime: < 8 times • Relatively low yield: typically <75% • High per pass wafer cost: >$60 300mm wafer pass • Many new films (i.e. BDII) are hard to remove

  6. RegenSi Technology The RegenSi process quickly removes films without removing silicon, and leaves the Si surface very smooth and passivated, enabling customers to increase the wafer use cycles while reducing cost. RegenSi 31 Dielectric Si wafer Si wafer Metal Barrier Metal RegenSi 34 Dielectric Si wafer Si wafer

  7. DHF 15:1 RegenSi 31 Overall Si spend 20-30% reduction with RegenSi implementation RMS=1.01nm RMS=0.353nm 40-50% reduction with RegenSi + Insourcing RegenSi Proven Value • Chemically removing films without grinding / polishing • Minimal Si damage with no pitting • Increased lifetime of Si test wafers • Higher wafer yield • Reduction in Si test wafer spending

  8. Metal Etch Rate of RegenSi 34 RegenSi Applications High Selectivity Etch Rate to Minimize Si Roughening

  9. Silicon Efficiency SolutionCase Study – Taiwan Foundry, 200mm BDII

  10. Silicon Efficiency SolutionCase Study (cont.) Cost Model Before vs. After Adopting ATMI RegenSi Customer is currently spending over $50M for wafer reclaim each year. With RegenSi • Cost for Reclaim/yr • Cost for New Wafer Replacements/ yr

  11. * 20% market penetration in 2011 would equate to $150 million in Revenue. Business Outlook

  12. Q&A

  13. ATMI, the ATMI logo, AccuDose, AutoClean, Better Process. Delivered., Cerulean, EPM, ErgoNOW, GasGauge, IDEAL Clean, LOK cap, NOWPak, NOWTrak, PDMPak, ProAct, the ProAct logo, ProE-Vap, RegenSi, SAGE, The Source of Process Efficiency, TiTaN Kleen, UniChem and VAC are trademarks or registered trademarks of Advanced Technology Materials, Inc. in the United States, other countries or both. SDS is a trademark or registered trademark of Advanced Technology Materials, Inc. and Matheson Gas Products, Inc. in the United States, other countries or both. Other company, product, or service names may be trademarks or service marks of others.

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