ITRS MEMS
ITRS MEMS. San Francisco, CA July 12, 2012. Presentation by Michael Gaitan, NIST. MEMS Technology Working Group. Chair: Mike Gaitan (NIST), Chair Co-Chairs: Robert Tsai (TSMC) and Philippe Robert (LETI). Toshiba Wispry Analog Devices SB Microsystems MEMSCAP National U of Singapore
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