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IMPLEMENTING VERTICALLY STANDING MIRRORS USING SOI MUMPS TECHNOLOGY

IMPLEMENTING VERTICALLY STANDING MIRRORS USING SOI MUMPS TECHNOLOGY. Simon Fraser University (Engineering Science) Group Members: Desmond Cheung Sunjaya Djaja Nima Jahedi Daniel Kim. Motivation. Create vertically standing mirrors Categorized as optical MEMS

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IMPLEMENTING VERTICALLY STANDING MIRRORS USING SOI MUMPS TECHNOLOGY

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  1. IMPLEMENTING VERTICALLY STANDING MIRRORS USING SOI MUMPS TECHNOLOGY Simon Fraser University (Engineering Science) Group Members: Desmond Cheung Sunjaya Djaja Nima Jahedi Daniel Kim

  2. Motivation • Create vertically standing mirrors • Categorized as optical MEMS • MEMS: Micro-Electro-Mechanical Systems • Optical MEMS used, for example, in telecommunications/photonics systems

  3. Challenge • Implement vertical mirrors using SOI MUMPS • SOI: Silicon-on-Insulator • Relatively easy to implement vertical structures using POLY MUMPS for example • Not so using SOI MUMPS • SOI MUMPS has only one structural layer • No conventional mechanisms like joints and hinges are available making design difficult

  4. Advantages of Using SOI MUMPS • Only one structural layer: lower cost, more reliable • Has a totally planar structure which is necessary for making micro-mirrors • For other technology, needs CMP before one can make mirrors on it

  5. Previous Attempts • Consist a mirror, push pad, torsion hinge, suspension, locking mechanism, pulling ring and springs

  6. Shortcomings of Previous Attempts • Faulty mechanism for latching mirror in upright position • Suspension springs broke resulting in important structures floating away during fabrication • Several critical features that are supposed to be in the same plane are misaligned

  7. Design Work (1) • Intuitive ideas of how micro-mirrors can be propped are conceived • Building cardboard models to verify intuition • Calculations of the dimensions of structures are made • Important thing to note is that things do not scale from human scale to micro scale in an intuitive manner

  8. Design Work (2) • Cadence Virtuoso Layout Tool is used for layout • Relatively easy laying out structures because SOI MUMPS has only one structural layer

  9. New Design Features • New latch mechanism for holding mirror vertically • Reduction in number of operations needed to prop up mirror • Simplicity of design • Increased reliability of mechanism

  10. New Designs • There are a total of 2 new designs with several different variants on feature sizes • Animations of the design in action will be given

  11. Limitations Encountered • Amount of trenches in SOI substrate must not exceed 33% • This is the most serious technology-related limitation • Technology-related limitation as opposed to design-related limitation

  12. d2 d1

  13. d2 d1

  14. Mirror Pull and Release

  15. Desmond’s Design Animation

  16. Desmond’s Design (1)

  17. Desmond’s Design (2)

  18. Desmond’s Design (3)

  19. Sun’s Design (1)

  20. Sun’s Design (2)

  21. Daniel’s Design: • Presentation3.avi

  22. Saewon’s Design

  23. Nima’s Design (1)

  24. Nima’s Design (2)

  25. Nima’s Design (3)

  26. Conclusion • The design was due on 23 June 2003 • The design would be back sometime in October 2003 • Testing will then commence • Depending on the success of the designs, hopefully at least one paper would be published

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