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ECE695P: Processing Plasma (1) Introduction

ECE695P: Processing Plasma (1) Introduction. JK LEE (Spring, 2006). ECE 695P: Plasma Processing (tentative). Week 1-3: Introduction, dc Discharges, PDP/BLU Week 4-6: Waves, Diffusion, rf Disch. Week 7-9: ICP, Collisions Week 10-12: Global Modeling, NL Sheath

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ECE695P: Processing Plasma (1) Introduction

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  1. ECE695P: Processing Plasma (1) Introduction JK LEE (Spring, 2006)

  2. ECE 695P: Plasma Processing(tentative) • Week 1-3: Introduction, dc Discharges, PDP/BLU • Week 4-6: Waves, Diffusion, rf Disch. • Week 7-9: ICP, Collisions • Week 10-12: Global Modeling, NL Sheath • Week 13-15: Etching, Diagnostics

  3. (Newtonian eqs) Ch.2 ◎Kinetic Eqs & Equil.Maxwell Distr Distribution Function as averaged quantity from truly kinetic : A bit more continuum(averaged, coarse-grained) Defined only on phase space meshes Fluid: n(xi,t) define only on spatial meshes Boltzmann eq with an unclosed form of collision term L&L(2.3.3),Golant(3.17) -Kinetic Simulations •Mol-Dynamics Sim •Particle Sim(P-P) •PIC (PIC/MCC;P3M;P-M) •Vlasov sim(Boltzmann Sim)

  4. *Collision Integral (L&L,Appendix B) f1: incident ptl’s distr. fn. (v1) f2: target ptl’s distr. fn. (v2) *The flux of incident ptls in a nest frame where v2=0 .reactive velocity .(#of incident ptls) *the #of incident ptls (per time) scattered out of the volume d3v1d3v2 into d is I-differential x-section for scattering thru elastic scatt. (scattered ptls:primed) (scattered) (incident) *Fokker-Plank Eq. (for small-angle binary Coul.coll. expansion ) dyn. friction vel. diffusion

  5. *Maxwellian Distr. -at equil. -Boltzmann -H-theorm Golant §4.2 (Internal energy of the j-state)

  6. V-dependent coll. Freq. High-v2

  7. Ee Ei 0 50 100 1 10 100 ◎ EEDF Druyvesteyn (5<Ee<20) Maxwellian -Using the Stewart(PSST`95,P39) fitting formula We integrate eqs.(1)&(2) for theory EDF or Use Godyak (PRL`98)

  8. ◎ ION EDF : IEDF - ion – neutral collision : strongly anisotropic The linearization as for EEDF is not appropriate - : Boltzmann equation for i Charge exchange collision (1) If = const, then (X-section) Maxwell (2) If S [2] ln [1]const M

  9. Fluid Eqs. & MHD Eqs. MHD eqs. 2-fl. Eq. -Fluid eqs.from Kinetic Eq. Taking 0th moment of Eq. of Continuity 1st moment of Eq. of motion 2nd moment of Energy balance eq.

  10. +q ◎ Debye Length(Shielding) -Basic Plasma Scales -Length: Debye Length -Time : Plasma oscillation period & -Debye Shielding (due to abundant plasma particles(esp. electrons) external charge (1)Why shielding ? (2)consequence of the shielding:

  11. Strong coupled ( P.E >> K.E. ) matter ( ie, solid ) Weakly coupled matter (ie, plasma, K.E.>>P.E. ) -Derivation of the Debye-shielded Potential

  12. LL-ch.2 Plasma Eqs. JK LEE (ECE695-P, Spring, 2006)

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