Industrialization of the DLC deposition process

1. Industrialization of the DLC deposition process Atsuhiko Ochi Kobe University RCGD2019@Bari 14/05/2019

2. Need for industrialization • Prototype  Mass production • Large size production • Two way for industrialization • Plan A: Prototype production in institute, and then mass production in industrial company • Pros: • Many trial for various condition can be done in short term and low cost • Cons: • It is not easy to find industrial company to make it to industrialization. (Some times, we need to make new company by ourselves) • Technology transfer is not so easy • Plan B From prototype, made by industrial company • Pros: • Technology transfer is already done from beginning • Cons: • If we cannot find the industrial company that can make prototype, it doesn’t work • Try and error cycle is slow, and it takes many costs A. Ochi, RCGD2019@Bari

3. DLC production in China • Lanzhou institute has their own spattering machine (case of plan A) • Many trial and results in various case have been reported in short term • It is not clear that the possibility of mass production • Also, the most of industrialization process from CERN seems to be case of plan A A. Ochi, RCGD2019@Bari

4. DLC production in JAPAN • We have already use industrial process (case of plan B) • Be-Sputter Co, Ltd., (Industrial company) • Their sputtering chamber is made by themselves • The sputtering equipment is very large • There are several sputtering chambers • Usually, they are work on metal sputtering • For electronics devices, optical devices, surface treatment … • Usually, they have not used carbon for sputtering • We have collaborated with Be-Sputter for preparing carbon target and improving C sputter quality. • Max size … 1m x 4.5m (foil) Be-Sputter Co. Ltd. (Kyoto Japan) A. Ochi, RCGD2019@Bari

5. Product of Be-Sputter • ITO transparent conductive film • Faraday cage on plastic • Etc … A. Ochi, RCGD2019@Bari

6. For micro patterning of DLC Photo resist (reverse pattern of surface strips) • We need industrial company with PCB process • Photo lithography process is needed for making mask of DLC • In our case, we used RAYTECH co. ltd. for patterning. @PCB company (Laytech inc.) Substrate (polyimide) Metal/Carbon sputtering @Sputtering company (Be-Sputter inc.) Substrate (polyimide) Developing the resists @PCB company (Laytech inc.) Substrate (polyimide) A. Ochi, RCGD2019@Bari

7. Most serious problem for industrialization • Most serious problem for Japanese industrial company (in our case, those are small company) is communication problem! • Both Be-sputter and RAYTECH cannot trade with oversea clients • They cannot make English documents • Most of all engineer/technician cannot communicate with English • Providing DLC materials to foreign institute, we need trading company, that is familiar with those product. • In our case, REPIC is used now. • For technical feedback, I have been a contact person. A. Ochi, RCGD2019@Bari

8. Industrialization in my case • I am belonging in University • Kobe University is not large institute, and it is very difficult to have a production facilities • When I have some idea or issues for prototype production … • I look for the industrial companies to do that • There is many industrial companies those who have attractive techniques. • However, it is important to us that how to find it. In many case, the companies, who can take on our prototype order, is small companies. • Then it is very important to survey the industrial companies • Industrial exhibition is important place to find new technology and to find who can do that • Keeping touch with technician and business staff of industrial companies to get news and connection for other companies • After finding the industrial companies • We have to keep in mind that we need costs • But it is cheaper than buying all equipment for new production by our selves • We have to applying external budget very often • Sometimes, we arrange the special materials by our selves • In the case of mass production • From start, we have to estimate the ability of mass production of the industrial companies. • If the company is too small to do mass production, they have some knowledge that how it works using other companies. A. Ochi, RCGD2019@Bari

9. In our case of DLC collaboration • We have both Plan A and Plan B • Plan A: Prototype production in institute, and then mass production in industrial company • Plan B From prototype, made it by industrial company • We can proceed industrialization process (for large size production, mass production) for new technology using complementary of both plan A and B ! A. Ochi, RCGD2019@Bari