800 Series Capillary Products

1. 800 SeriesCapillary Products Mass Flow Product Training Sierra Instruments 2001

2. Agenda • Overview – “Why Mass Flow?” • Theory of Operation • Sierra Instruments’ Product Lineup • Mass Flowmeter Accuracy • Meter Sizing Example • Mass Flowmeter Applications

3. Why Mass Flow? • When accuracy and repeatability are critical • Gas density is highly variable • Process immunity • To eliminate effects of variable pressure and temperature • To eliminate effects of variable back pressure

4. What is a Mass Flow Meter/Controller? • Measurement and/or flow control from a single device • Uses heat transfer properties of gas to determine mass flow rate • Real mass flow, not inferred • Gas applications only • Controller is a meter with a valve

5. Product Benefits • Applicable to 300 different gases & gas mixtures • Can calibrate with low cost and safe reference gases • Wide Full Scale Rangeability: 10 sccm to 5600 SLPM • Low flow sensitivity

6. Theory of Operation Three/Four major components: • Capillary Tube • Flow body with Laminar Flow Bypass • Electronics • Valve (only if it is a controller)

7. Mass Flow Meter/Controller Functional diagram • Gas enters flow body and splits into two paths: • Bypass • Capillary tube • Mass flow is measured • Gas recombines and enters control valve • Valve (adjusted via setpoint)

8. Capillary Tube Flow Sensor • Small diameter, 316 SS tube • Platinum coils • Mass flow rate through tube is proportional to the change in temperature

9. Capillary Sensor Tube

10. Laminar Flow Bypass • Ensures mass flow through sensor tube is proportional to mass flow through main body • Eliminates error due to temperature changes in the gas

11. Laminar Flow Element

12. Electronics • Coils heating capillary tube are connected to bridge circuit • Voltage across coils is proportional to the change in temperature • Since change in temperature is proportional to mass flow… • Mass flow is proportional to Voltage

13. Electronics Schematic

14. 800 Series Capillary Mass Flow Meters and Controllers • Models 810M, 820, 830 Meters • Models 810C, 840 Controllers

15. Features Low cost body, valve and electronics High stability sensor Onboard display option Local or remote set-point control Flows up to 50 SLPM 2% F.S. accuracy Benefits Lowest cost MFC on the market No zero drift No need for separate display Customer flexibility for valve control Wide range of control Model 810M and 810C

16. Features Both 4-20mA and 0-5VDC output and command signals Same fast acting valve as on the 840 - 2 Second time response typical Benefits Field selectable and available at no extra charge Reliable design proven to be the best in the industry (thousands installed) Model 810M and 810C

17. Features 316 body High stability sensor Onboard display option Local or remote set-point control Flows up to 100 SLPM 2% F.S. accuracy Benefits MFC, 24V power, local setpoint No zero drift No need for separate display Customer flexibility for valve control Wide range of control Model 810S

18. Features Tiltable scale Wide range of flows and body materials , such as stainless steel, nylon, and aluminum 2% F.S. accuracy and 1% F.S. accuracy on SS body Benefits Easy to read Compatible with a number of gases and mixtures of gases Flows to 50 SLPM nylon, to 175 SLPM aluminum and to 500 SLPM Model 820 Mass Flow Meter

19. Features + 1% of F.S. accuracy and control to 2% of span Ranges from 10 SCCM to 200 SCFM Benefits Offer the customer the widest range of meters for their applications Model 830/840 MFM & MFC

20. Features Fast response time to setpoint change without overshoot Large, straight, cleanable sensor 316SS wetted materials with a variety of elastomers Benefits Maximizes process control characteristics Reduces down time and minimizes error Compatible with a wide range of gases Model 830/840 MFM & MFC

21. MFC Accuracy • Accuracy begins with calibration • Primary standard is important • Traceability in calibration • 4:1 rule

22. Capillary Calibration • Five Point Linearization • Use of K-factors to approximate different gases • Accurate process application data needed for calibration

23. MFC Sizing To size the capillary meters, you need to: • Obtain the max. flow rate of the gas that is to be measured/controlled by the meter. • Convert the estimated flow rate to the corresponding units listed in the product specifications. • If the gas to be measured is not nitrogen, convert the flow rate to the Equivalent Nitrogen flow rate. • Select the flow body size that will accommodate the estimated flow rate. • Verify the differential pressure falls within the acceptable range

24. Sizing Example

25. MFC Sizing To size the capillary meters, you need to: • Obtain the max. flow rate of the gas that is to be measured/controlled by the meter. • Convert the estimated flow rate to the corresponding units listed in the product specifications. • If the gas to be measured is not nitrogen, convert the flow rate to the Equivalent Nitrogen flow rate. • Select the flow body size that will accommodate the estimated flow rate. • Verify the differential pressure falls within the acceptable range

26. Sizing Example

27. MFC Sizing To size the capillary meters, you need to: • Obtain the max. flow rate of the gas that is to be measured/controlled by the meter. • Convert the maximum flow rate to the corresponding units listed in the product specifications. • If the gas to be measured is not nitrogen, convert the flow rate to the Equivalent Nitrogen flow rate. • Select the flow body size that will accommodate the estimated flow rate. • Verify the differential pressure falls within the acceptable range

28. Sizing Example • Check Manufacturer’s Specifications • Sierra Model 840 MFC • Low flow – 0 – 15 SLPM • Medium flow: 0 – 100 SLPM • High flow: 0 – 500 SLPM • Convert Units:

29. MFC Sizing To size the capillary meters, you need to: • Obtain the max. flow rate of the gas that is to be measured/controlled by the meter. • Convert the estimated flow rate to the corresponding units listed in the product specifications. • If the gas to be measured is not nitrogen, convert the flow rate to the Equivalent Nitrogen flow rate. • Select the flow body size that will accommodate the estimated flow rate. • Verify the differential pressure falls within the acceptable range

30. Sizing Example • Convert argon flowrate to equivalent nitrogen flowrate • Pick the appropriate flow body size: 1.263 SLPM = Low Flow body

31. MFC Sizing To size the capillary meters, you need to: • Obtain the max. flow rate of the gas that is to be measured/controlled by the meter. • Convert the estimated flow rate to the corresponding units listed in the product specifications. • If the gas to be measured is not nitrogen, convert the flow rate to the Equivalent Nitrogen flow rate. • Select the flow body size that will accommodate the estimated flow rate. • Verify the differential pressure falls within the acceptable range

32. Sizing Example • Note differential pressure in this example is 2 Barg. • Specifications for Model 840 with Low Flow body are 0.35-3.5 Bar differential. • This is the correct meter for us.

33. Applications • OEM – Gas Moisture Analyzer • OEM – Semiconductor • Manufacturing – Leak Test • Food & Beverage • Industrial • Pharmaceutical • Biotech • Analytical

34. Gas Moisture Analyzer • Measures gas moisture concentration • Critical to Semicon process • MFC ensures accurate sample flow to analyzer

35. Vapor Deposition & Sputtering • First use of MFC’s • Semicon process for laying metal on silicon wafer • Uses argon as plasma • MFC controls Argon flow to chamber • Improved wafer yield over traditional manual controls

36. Leak Testing • Used in QA process • MFM used to measure leak in pressure containing devices • Low flow sensitivity < 10 SCCM

37. Food & Beverage • MFCs are used to control the mass of air injected into food products such as • Ice cream and frozen desserts • Frostings and whipped spreads • Candy and confections • Peanut butter, margarine, shortening

38. Food & Beverage • Why Inject Gas? • Handling quality • Taste quality • Marketing quality • Increase Profits • Mass measurement allows conformance with federal regulations

39. Identifying Opportunities • Air injection is often used to process foods that are “fluffed” • High profit products are best, as food industry is “CHEAP” • Best opportunities are with manufacturers of “specialty” food processing equipment

40. Food Packaging • Oxygen, nitrogen, carbon dioxide and other gases are often injected into food packages to improve shelf life • Mass flow control reduces cylinder gas waste and improves throughput and performance of packaging equipment

41. Brewery/Beverage Processing • Air or nitrogen injection is controlled by MFC's during beer fermentation process • MFC's are used to regulate carbon dioxide injected into bottles during filling and capping

42. MFC Benefits • Ensures accurate gas delivery in varying temperature and pressure conditions • Eliminates the need for operator adjustment of flow rates • Cleanable, large-diameter sensor facilitates maintenance

43. Industrial • Heat Treating • Combustion Control - Annealing • Oven Blanketing • Circuit Board Curing • Glass Manufacturing • Flame Control for Sealing • Exotic Gas Fill

44. Industrial • Aluminum Purification • Chlorine Bubbling • Argon Carrier Gas • Welding • Plasma • Laser

45. Pharmaceutical • Batch Reactors • Tank and Package Blanketing • In-Line Process Chromatography • Aeration and Atomization • Pill Coating

46. Biotech – Fermenters • Control of Oxygen to facilitate constant yields • More than 100,000 benchtop fermenters installed worldwide • Most benchtop units currently control sparging air with rotameters and needle valves…Model 810 opportunity

47. Analytical Applications • Sample Preparation for GCs • Gas Analyzers • Gas Generators • ICP Mass Spectrometry • Flow Meter Calibration and Validation

48. Conclusion • Thermal MFC benefits • Low flow sensitivity • Immunity to process changes • Built in control capability = Great Application Base Great Opportunities

49. Mass Flow Questions?