Factory Info & Control Systems (FICS)

1. Factory Info & Control Systems (FICS) July f2f 2005 report out

2. Contents • 2005 FICS Participants • Activities & Status • Equipment Security Discussions Summary • Automation Ratios Discussions Summary • Next Steps • Finalize inputs to 2005 ITRS FI roadmap (Aug 2005) • Discussion topics today • Automation Ratios • Requirements Table

3. 2005 FICS Participants • Ya-Shian Li - NIST • Lisa Pivin – Intel • Anant Raman – Intel • Brad Van Eck – ISMI • JB Ragothaman – Intel • Richard Oechsner – IIS • Les Marshall – AMD • Harvey Wohlwend – ISMI • Jonathan Chang – TSMC • Bob Wiggins – IBM • Mike Buffano – Brooks • Arieh Greenberg – Infineon

4. Supply Chain (Mask Throughput ) Thomas Chen – TSMC Ton Govaarts – Philips Richard Oechsner - IIS Joe Gordon - DuPont Ya Shian – NIST Barbara Goldstein – NIST Visual Manufacturing Homna-san (JB to follow-up) Mike Bufano - Brooks Equipment Security Anant Raman - Intel Harvey Wohlwend - ISMI Richard Oechsner – IIS Automation Ratios Jonathan Chang (TSMC) 2005 SubTeams / Status Summary • Visual Manufacturing -- Status • Decided to roll-up into the focus areas section for 2005 • Equipment Security Status • Requirements, challenges and potential solutions discussed and agreed upon. See next slides • Automation Ratios Status • Discussed in face-to-face. Dropped for this year. See next slides • Supply Chain – Status • Dropped since the sub-team concluded that no additional changes required for 2005 • Revisions to Technology Requirements Table – Status • No changes to 2004 so far

5. Equipment Security • Key Requirement • Factory level and equipment level downtime due to security incident must be zero • Key Challenge has been: • Protecting Equipment from cyber security threats • Solutions developed to-date have been documented as Equipment Security Guidelines under ISMI/Sematech • IC Maker Responsibilities • Establish Factory network capabilities to control access • Institute Business processes to control direct access to equipment • OEM Responsibilities • Harden computer configurations (password, no public shares, audit procedures etc) • Institute business processes and training to field service engineers • For new equipment, provide OS that is in currently supported life cycle • No wireless network within equipment • Security Upgrades to equipment provided as optional service • Network level security at the equipment level as an optional capability • Next Steps • Must adopt the Security Guidelines described above • In addition, equipment system integrity and IP protection related issues must be addressed • See next page for details

6. Equipment System Weaknesses • Exiting the User Interface terminates the application • Terminating the application brings down equipment • Terminating the application brings down the User Interface also • Application & User Interface have to running all the tie in the foreground • Only one effective user on the equipment to keep equipment running • One user for multiple roles – tool owner, field service engineer, factory technician, etc • The user is granted the union (set operation) of all users of privileges with one password for all users • Remote User access to equipment via remote access or remote control software • Remote User gets same privileges as the local user for Windows based computers Security Problem: System Integrity & Intellectual Property based on current design

7. Solving System Integrity & IP Issues • First step: Convert the equipment software to modular architecture – decouple UI & application • Second Step: Make the application a service or a background application – continuously running • Third step: Make the application functionality sensitive to the different users – role based security (fundamental to IP Security) Security Capability: System Integrity & IP Protection using modular Software Architecture

8. New Metric: Automation Ratios discussion & disposition • Full automation (human-free operation) has been the vision for semiconductor manufacturing. We need to define metrics to drive towards this goal while addressing the challenges. • It was proposed that we decompose full-automation to key components so we can drive the individual components and address the problem in a step-wise fashion • Team was proposing the following 4 key metrics in this area: • Equipment Automation Ratio • Transportation Automation Ratio • Dispatcher Automation Ratio • Scheduler Automation Ratio • This item was discussed in face-to-face • Disposition • See next page

9. Automation Ratios Discussion Summary • Ratios considered were: equipment auto, transportation auto, dispatching auto and scheduling auto ratios • What are we using automation ratio to drive? • Capability or • Usage / maturity (quality of implementation) • Approaches • Goals, challenges to meeting the goals, roadmap • To drive capability Roadmap • Do benchmarking to understand to understand usage / maturity levels • To understand usage and learn from each other • Summary / Next Steps • Equipment Automation & Transportation Automation: • No capability gaps. Benchmarking may help to understand any quality/implementation issues • Next Step: No addition to ITRS table. Engage with Sematech for common interest • Dispatching & Scheduling Automation • There may be capability gaps. Subteam to further discuss any specific capability gaps that hinder the goal of 100% automation in the dispatching/scheduling space. • Next Step: No additions to 2005 tables. Start discussions for 2006 changes in this space.

10. Backup

11. 2004 Changes Table 88a Factory Information and Control Systems Technology Requirements—Near-term WAS NEW WAS NEW WAS NEW NEW

12. 2004 Changes Table 88b Factory Information and Control Systems Technology Requirements—Long-term WAS NEW WAS NEW WAS NEW NEW

13. Basics: Equipment Connectivity Landscape • Equipment connectivity from users in the office and the Internet • Equipment connectivity in the factory to automation systems • Equipment connections to the factory network is fundamental to overall security • Connectivity is required for function and management • Manufacturing seeing growth of wireless network Wired & Wireless Security Problem# 1: Vulnerable to Cyber Attacks from the Network

14. dispatching DA dispatching AMHS AMHS TA EA Track-In Track-out Tool OP Automation Levels Concepts Full Automation (FA) = Equipment Automation (EA) + Transport Automation (TA) + Dispatching Automation (DA) + Scheduling Automation (SA)

15. YEAR OF PRODUCTION 2004 2005 2006 2007 2008 2009 MPU 90 80 70 65 65 45 WAFER DIAMSTER 300mm 300mm 300mm 300mm 300mm 300mm Factory Cycle Time per Mask Layer (Normal) 1.1 1.1 1.1 1 1 0.9 Factory Cycle Time per Mask Layer (Hot) 0.65 0.65 0.65 0.65 0.6 0.55 Wafer-Layer/Day/Headcount 41 41 41 41 45 48 Dispatch-Automation Rate (FA) 60% 70% 80% 80% 90% 90% Transportation-Automation Rate (TA) 90% 90% 90% 95% 95% 98% Equipment Automation (EA) 100% 100% 100% 100% 100% 100% Was/Is/Why for approval Sub-team: FICS Was: “NEW” Is: New Proposed Metric (example below) Why: Brief reason for change (example below) Since I300I defined 300mm FAB operation in 1998, each 300mm FAB has invested a lot to implement a full-automation environment, but the requirement for full-automation operation has never been defined. So we proposed the metrics for “equipment-automation”, “transportation-automation” and “dispatch-automation” for business requirement for future FICS development strategy, Equipment Automation is fundamental item need to be compliant with all SECS/GEM standard. Approve: Yes / No Supporting documents: List supporting documents here (example below) Equipment technology table enclosed.

16. Automation Ratio Metrics Full Automation means human-free operation which includes key components of equipment, transportation and dispatching automation and integration Dispatching Automation (DA) definition: (human-free dispatching with AMHS operation) Daily move handled by dispatch-automation operation / all FAB moves. DA Scope : All move in FAB, including • production wafers • non-production wafers • production process • and non-production process (tool monitoring, non-production wafer preparation..) Transport Automation (TA) definition: (human-free transportation with AMHS operation) Daily move handled by AMHS operation to put in load-port / all FAB moves. TA Scope : All move in FAB, including • production wafers • non-production wafers • production process • and non-production process (tool monitoring, non-production wafer preparation..)

17. Automation Ratios Metrics Challenge: • Equipment Automation support • AMHS coverage • AMHS performance • Dispatching Performance • Dispatching Rules Quality Potential Solution: • Tool’s compliance for SEMI standard -- Quality • New AMHS technology -- not clear what capabilities -- work with AMHS sub-team on delivery targets, anything lacking from controls? • Dispatching system architecture -- what issues, how will it help • Dispatching rule quality assessment -- how do we do this, coverage against scenarios, • Dynamic Dispatching Adjustment • Embedded Dispatching Rule in CIM system and tool S/W -- ? • How doe we model real factory scenarios • Implementing the prioritized decision

18. Explanation

19. Potential Solution • Enhanced dispatching system to integrate MES and EES system for optimized dispatching algorithm to cover all FAB operation scenarios – including production wafer, tool monitoring, exception handling, super-hot run management and so on. • Research Required 2001-2004 • Development Underway 2004 – 2006 • Qualification / Production 2007