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CMOS Technology: Steps in Channel N and Channel P Transistor Fabrication

Learn the key steps involved in creating N-channel and P-channel transistors in CMOS technology, including substrate preparation, oxide and nitride deposition, gate formation, and metal contact placement.

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CMOS Technology: Steps in Channel N and Channel P Transistor Fabrication

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  1. Tecnologia CMOS I passi principali per la realizzazione di transistori a canale n e a canale p

  2. input GND VDD output n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  3. input GND VDD output n+ n+ n+ p+ p+ p+ n-well p substrate +SiO2 +SiO2

  4. n-well n-well mask p substrate photoresist SiO2 n+ n+ n+ p+ p+ p+ n-well p substrate p substrate

  5. n-well p substrate photoresist SiO2 n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  6. active mask n-well p substrate photoresist Nitride n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  7. channel stop mask n-well p substrate n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  8. n-well n-well mask p substrate n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  9. n-well p substrate n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  10. n-well p substrate n+ n+ n+ p+ p+ p+ n-well n-well gate oxide p substrate p substrate

  11. polysilicon mask n-well p substrate polysilicon n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  12. n+ mask n-well p substrate n+ n+ n+ n+ n+ n+ p+ p+ p+ n-well n-well gates p substrate p substrate n-well p substrate

  13. p+ mask n-well p substrate n+ n+ n+ n+ n+ n+ p+ p+ p+ p+ p+ p+ n-well n-well p substrate p substrate n-well p substrate

  14. n-well n+ n+ n+ p+ p+ p+ p substrate n-well p substrate

  15. contact mask n+ n+ n+ n+ n+ n+ p+ p+ p+ p+ p+ p+ n-well n-well n-well n-well p substrate p substrate p substrate p substrate

  16. metal1 mask n+ n+ n+ n+ n+ n+ p+ p+ p+ p+ p+ p+ n-well n-well n-well n-well p substrate p substrate p substrate p substrate

  17. input rl GND VDD l l output R = = RS = R t w w w t w l n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  18. n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  19. n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  20. input GND VDD output n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  21. n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

  22. n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate

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