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Tecnologia CMOS I passi principali per la realizzazione di transistori a canale n e a canale p. input. GND. VDD. output. n+. n+. n+. p+. p+. p+. n-well. n-well. p substrate. p substrate. input. GND. VDD. output. n+. n+. n+. p+. p+. p+. n-well. p substrate. +SiO 2.
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Tecnologia CMOS I passi principali per la realizzazione di transistori a canale n e a canale p
input GND VDD output n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
input GND VDD output n+ n+ n+ p+ p+ p+ n-well p substrate +SiO2 +SiO2
n-well n-well mask p substrate photoresist SiO2 n+ n+ n+ p+ p+ p+ n-well p substrate p substrate
n-well p substrate photoresist SiO2 n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
active mask n-well p substrate photoresist Nitride n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
channel stop mask n-well p substrate n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
n-well n-well mask p substrate n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
n-well p substrate n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
n-well p substrate n+ n+ n+ p+ p+ p+ n-well n-well gate oxide p substrate p substrate
polysilicon mask n-well p substrate polysilicon n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
n+ mask n-well p substrate n+ n+ n+ n+ n+ n+ p+ p+ p+ n-well n-well gates p substrate p substrate n-well p substrate
p+ mask n-well p substrate n+ n+ n+ n+ n+ n+ p+ p+ p+ p+ p+ p+ n-well n-well p substrate p substrate n-well p substrate
n-well n+ n+ n+ p+ p+ p+ p substrate n-well p substrate
contact mask n+ n+ n+ n+ n+ n+ p+ p+ p+ p+ p+ p+ n-well n-well n-well n-well p substrate p substrate p substrate p substrate
metal1 mask n+ n+ n+ n+ n+ n+ p+ p+ p+ p+ p+ p+ n-well n-well n-well n-well p substrate p substrate p substrate p substrate
input rl GND VDD l l output R = = RS = R t w w w t w l n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
input GND VDD output n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate
n+ n+ n+ p+ p+ p+ n-well n-well p substrate p substrate