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Jacque Jackson

Determining the refractive index of scandium oxide in the EUV using Kramers-Kronig on thin-film transmission data. Jacque Jackson. multilayer mirror. normalized data. Kramers-Kronig Dispersion Relations. Graph of the percent difference between the two.

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Jacque Jackson

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  1. Determining the refractive index of scandium oxide in the EUV using Kramers-Kronig on thin-film transmission data Jacque Jackson

  2. multilayer mirror

  3. normalized data

  4. Kramers-Kronig Dispersion Relations

  5. Graph of the percent difference between the two Graph of delta from synthetic data and the KK calculated from the synthetic beta data

  6. Graph of the percent difference between the two Graph of RTdelta and the KK calculated from the RT beta

  7. Results of truncating the data set

  8. Results of truncating the data set

  9. Results of KK analysis on RT beta data that has not been smoothed

  10. Results of KK analysis on RT beta data that has been smoothed

  11. Results of KK analysis on RT beta data that has not been augmented with CXRO data – plotted with the RT and CXRO delta data

  12. Results of KK analysis for density of 3.2 g/cm3 – For this density, the KK calculation is less than the experimental calculation, but with a similar shape, at lower energies and follows neither CXRO nor experimental values at higher energies.

  13. Results of KK analysis for density of 3.86 g/cm3 – For this density, the KK calculation is greater than the experimental calculation, but with a similar shape, at lower energies and matches CXRO values more closely at higher energies.

  14. Percent difference between RT delta and delta calculated from KK analysis on RT beta augmented with synthetic data

  15. Graph of the delta calculated from KK analysis on RT beta augmented with synthetic data, plotted with the RT delta and the delta provided by CXRO for the density being used (3.86 g/cm^3)

  16. Future Research • Obtain data below 30 eV • Account for roughness in calculations • Use this method on other materials with features at different energies • Check on the reliability of data obtained from CXRO

  17. Acknowledgements • Dr. Allred • Dr. Turley • Guillermo Acosta

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