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PRESENTATION ON

PRESENTATION ON Design and Simulation of M icro C antilever Energy H arvester u sing MEMS switch . Introduction. MEMS stands for Micro Electro Mechanical System. Two types of switches are mainly used- 1. DC contact switch 2. Capacitive switch Design tools for MEMS-

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PRESENTATION ON

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  1. PRESENTATION ON Design and Simulation of Micro Cantilever Energy Harvester using MEMS switch

  2. Introduction • MEMS stands for Micro Electro Mechanical System. • Two types of switches are mainly used- 1. DC contact switch 2. Capacitive switch • Design tools for MEMS- 1. COMSOL 2. Coventor Ware 3. Intellisuite 4. Ansys

  3. DC Contact switch using Coventor Ware

  4. Parameters

  5. Pull In Result Displacement (m) Actuation Voltage (V)

  6. Transient Analysis Displacement (m) Time (Second)

  7. Capacitive switch design in COMSOL

  8. Displacement Result

  9. Surface Potential Result

  10. Energy Harvester

  11. Displacement Result

  12. Surface Potential Result

  13. Applications

  14. Advantages of MEMS switches Near-zero power consumption High isolation Low insertion loss Low cost manufacture High linearity Large bandwidth operational range

  15. Disadvantages Relatively low switching speed Low power handling capability High actuation voltage Lack of suitable packaging and low reliability

  16. Thank You

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