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PRESENTATION ON Design and Simulation of M icro C antilever Energy H arvester u sing MEMS switch . Introduction. MEMS stands for Micro Electro Mechanical System. Two types of switches are mainly used- 1. DC contact switch 2. Capacitive switch Design tools for MEMS-
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PRESENTATION ON Design and Simulation of Micro Cantilever Energy Harvester using MEMS switch
Introduction • MEMS stands for Micro Electro Mechanical System. • Two types of switches are mainly used- 1. DC contact switch 2. Capacitive switch • Design tools for MEMS- 1. COMSOL 2. Coventor Ware 3. Intellisuite 4. Ansys
Pull In Result Displacement (m) Actuation Voltage (V)
Transient Analysis Displacement (m) Time (Second)
Advantages of MEMS switches Near-zero power consumption High isolation Low insertion loss Low cost manufacture High linearity Large bandwidth operational range
Disadvantages Relatively low switching speed Low power handling capability High actuation voltage Lack of suitable packaging and low reliability