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Science Saturday --- October 1, 2005. IBM chip. UMass Logo. TI mirror array. Nanotechnology. Exciting new science and technology for the 21st century. Nanotechnology. Is a broad, interdisciplinary topic involving physics, chemistry, biology and engineering
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IBM chip UMass Logo TI mirror array Nanotechnology Exciting new science and technology for the 21st century
Nanotechnology Is a broad, interdisciplinary topic involving physics, chemistry, biology and engineering It has potential impact in electronics, medicine, materials, and a wide variety of application areas.
Single Hair Width = 0.1 mm How small are nanostructures? = 100 micrometers = 100,000 nanometers ! 1 nanometer = one billionth (10-9) meter
DNA 6,000 nanometers Red blood cell 3 nanometers Smaller still Hair .
How do we make nanostructures? How do we see nanostructures?
First,how do we make nanostructures? • Lithography • Self-assembly
Lithography Mark Tuominen Mark Tuominen
Electron Beam Polymer film Silicon crystal Making a microscopic mask Nanoscopic Mask !
Lithography Patterned Several Times IBM Copper Wiring On a Computer Chip
~10 nm SELF ASSEMBLY Block “B” Diblock Copolymer Block “A” PS PMMA Scale set by molecular size Ordered Phases 10% A 30% A 50% A 70% A 90% A
BASIC NANOPOROUS TEMPLATE PROCESS APPLICATIONS Deposition Template Etching Mask Remove polymer block within cylinders (UV or ebeam exposure; Acetic acid rinse) Nanoporous Membrane “A versatile, self-assembling, nanoscale lithographic system”
SEM IMAGE OF NANOPOROUS POLYMER TEMPLATE PS/PMMA MW = 42,000 Array Period = 24 nm Pore Diameter = 14 nm
Nanowires Template Transfer Copolymer Template Separations & Sensors Patterned Media Glass Pillars FUNCTIONAL NANOARRAYS NIRT UMass Amherst Devices
200 nm 100 nm 20 nm unfilled polymer template electrodeposited cobalt nanowires gold silicon NANOWIRE ARRAYS using ELECTRODEPOSITION 1 0 1 1 0 cobalt nanowires • ULTRA-HIGH DENSITY MAGNETIC DATA STORAGE 1.2 trillion wires/in2
LATERALLY-PATTERNED MEDIA vertically-oriented diblock copolymer film NO HOLES “patterned” nanoporous polymer template unexposed region of copolymer film HOLES “patterned” nanowire array
How do we see nanostructures? • A light microscope? • An electron microscope! • A scanning probe microscope!
TV screen eye electron beam electron source Light ! Television Set
Electron Beam DETECTOR SAMPLE Electron Microscope
Surface Scanning probe microscope Vibrating Cantilever