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The Monolithic 3D-IC

The Monolithic 3D-IC. A Disruptor to the Semiconductor Industry. Monolithic 3D Provides an Attractive Path to…. LOGIC. Monolithic 3D Integration with Ion-Cut Technology. Can be applied to many market segments. MEMORY. OPTO-ELECTRONICS. 3D-CMOS : Monolithic 3D Logic Technology

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The Monolithic 3D-IC

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  1. The Monolithic 3D-IC A Disruptor to the Semiconductor Industry MonolithIC 3D Inc. Patents Pending

  2. Monolithic 3D Provides an Attractive Path to… LOGIC Monolithic 3D Integration with Ion-Cut Technology Can be applied to many market segments MEMORY OPTO-ELECTRONICS • 3D-CMOS: Monolithic 3D Logic Technology • 3D-FPGA: Monolithic 3D Programmable Logic • 3D-GateArray: Monolithic 3D Gate Array • 3D-Repair: Yield recovery for high-density chips • 3D-DRAM: Monolithic 3D DRAM • 3D-RRAM: Monolithic 3D RRAM • 3D-Flash: Monolithic 3D Flash Memory • 3D-Imagers: Monolithic 3D Image Sensor • 3D-MicroDisplay: Monolithic 3D Display

  3. Monolithic 3D to Re-Engineer and Revive Gate Arrays Continuous Array Mix Match I/O Logic Fabric Memory Fabric

  4. MonolithIC GateArray: A Monolithic 3D Gate Array Technology I/O layer Memory layer Gate Array Layer 2 Gate Array Layer 1 • Transistor masks pre-defined, interconnect layers customized. Low NRE costs, but good performance. • Repeating transistor Structure works well with advance Litho and with Gate Replacement 3D path • Solves memory issue of traditional gate arrays where logic fabric is a poor fit for memory. Once memory portion is moved up, Standard Cell is at least 50% more efficient.

  5. Reinventing GA using 3D • Use different dies for: • Logic Fabric • Memory Fabric • I/O Fabric • Build Reticle Size • ~One Mask set with many die/functions size options • Choice of process node and fabrication processes

  6. GA chip with IO Scribe lanes IO “chiclet” with TSV prep Traditional wafer of chips TSVs GA Logic-only chunk TSV Continuous Array of Logic at 22nm Wafer of IO Chiclets at 0.15 m Traditional GA Wafers vs. Continuous Array Wafers Scribe lanes

  7. Chip size 9 Chip size 4 Scribe lane Chip size 20 GA Logic-only chunk Continuous Array Terrain Allows Defining Custom Logic Sizes from Same Wafers • Long metal tracks cross scribe lines • Die edges need to be sealed after cut • Top wafer prepped for TSVs or micorbumps in standard pattern (“socket”) over logic chunks

  8. Standard TSV pattern Chip with logic size 9 Chip with TSV visible 3D Hybrid stack with TSVs TSV prep • Chiclets assembly actually happens prior to wafer dicing IO 0.15 m memory 22 nm SerDes 90 nm Chiclets Assembling Continuous Array Terrain into Customized Hybrid Stacks

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