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Buying a PEALD reactor for TaN deposition for Aalto University 9.3.2010

Buying a PEALD reactor for TaN deposition for Aalto University 9.3.2010. Outline. TaN Market research Supplier Budget On-site arrangements. Steps of the process. Tantalum Nitride. Properties Purity Density Resistivity Stability Adhesion. Applications

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Buying a PEALD reactor for TaN deposition for Aalto University 9.3.2010

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  1. Buying a PEALD reactor for TaN deposition for Aalto University 9.3.2010

  2. Outline • TaN • Market research • Supplier • Budget • On-site arrangements

  3. Steps of the process

  4. Tantalum Nitride • Properties • Purity • Density • Resistivity • Stability • Adhesion • Applications • Diffusion barrier layers • Gate electrodes • Passivation layers • Protective coatings • Deposition (ALD vs. PEALD) • Lower resistivity • Higher density • Higher purity • Safety

  5. Oxford Instruments • Oxford Instruments is a global company operating since 1959 with offices and manufacturing sites in over 25 locations. • Oxford Instruments Head Office Tubney Woods, Abingdon, Oxfordshire, OX13 5QX, UK.

  6. Picosun • Picosun is an international equipment manufacturer with a world-wide sales and service organization. • Has continuously designed ALD systems since 1975. • Headquarter: • Picosun OyTietotie 3FI-02150 EspooFinland

  7. Beneq • Beneq was established in May 2005 • Activity is focused on equipment and technology for functional coatings • Main office: Beneq OyP.O. Box 262FI-01511 VantaaFinland

  8. Supplier: Beneq Oy • Close partnership • Long experience with their equipement in our clean room • Our old ALDs don’t have a standard PEALD option • Easy communication • Easy delivery = lower costs

  9. Beneq TFS 200 for research • Direct and remote PEALD • Growth of various films possible • Price 303,600 € for TaN growth

  10. Budget • TFS 200 system for TaN growth: 303,600 € • Vacuum pump, other appliances and installation costs: 30 k€ • Additional sources: 6900 – 18700 € each • Operating costs: 20 k€ / year

  11. On-site arrangements delivery installation testing trainings TaN processing HAPPY RESEARCHER

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