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ITRS 2003 - Environmental, Safety and Health Chapter

ITRS 2003 - Environmental, Safety and Health Chapter. July 16, 2003 – San Francisco, California. AGENDA. ESH Chemical Reference Table Changes to ESH Requirements Resource Conservation Recycling Areas for additional comment. Chemical Restrictions Table.

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ITRS 2003 - Environmental, Safety and Health Chapter

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  1. ITRS 2003 - Environmental, Safety and Health Chapter July 16, 2003 – San Francisco, California

  2. AGENDA • ESH Chemical Reference Table • Changes to ESH Requirements • Resource Conservation • Recycling • Areas for additional comment

  3. Chemical Restrictions Table • Ready Reference for Identifying Chemicals With Restrictions • Use • Content • Classification of chemicals would not be owned by ITRS • Linked from requirements in ESH and Focus thrusts

  4. Sample Table

  5. Water Conservation • ESH requirement issues: • Total Water compared to UPW assumes 70-80% efficiency • Water metric for equipment is per cm2 per wafer pass – needs to be one or the other • Adjustments for 300mm only technology and # of factories having met target

  6. UPW Water Use Data (high, low, average) UPW Water Use (liters/sq cm)

  7. Water Conservation

  8. Recycling • ESH requirement issues: • Process chemical recycling • Copper recycling of 50%, 75% and 100% for 2003, 2005 and 2008 respectively

  9. Chemical Recycling

  10. Recycling (Interconnect)

  11. Areas Requiring Additional Comment • Energy Conservation • Definitions: • ‘ESH-Friendly’ • ‘Lowest Hazard Material’ • ‘Minimum Emission’ • ‘Lowest ESH Impact

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