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ITRS 2004 Environmental, Safety and Health Chapter

ITRS 2004 Environmental, Safety and Health Chapter. ITRS Conference, San Francisco, CA. July 14, 2004. Proposed Updates for 2004. AGENDA. Areas Under Discussion for 2005. Elimination of Requirements that are already “ESH Best Practices”. Table 102 (Workplace Protection) Exposure Data

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ITRS 2004 Environmental, Safety and Health Chapter

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  1. ITRS 2004 Environmental, Safety and Health Chapter ITRS Conference, San Francisco, CA July 14, 2004

  2. Proposed Updates for 2004 AGENDA • Areas Under Discussion for 2005

  3. Elimination of Requirements that are already “ESH Best Practices” • Table 102 (Workplace Protection) • Exposure Data • Dependency upon Personal Protective Equipment • Equipment/Process Risk Assessments • Ergonomic Stressor Evaluation • Collection of Regulatory Requirements • Pollutant Release and Transfer Disclosure

  4. Restructured “Design for ESH” Section • Interim solutions are being used for Life Cycle Assessments (LCA) and for Chemical Risk Assessments. • Pollutant Release and Transfer Disclosure was dropped. • Regulatory requirements were dropped because they are covered by existing Environmental Management Systems.

  5. Resource Conservation for Energy and Water • Energy Conservation (Table 102) • Ratio of Fab Equipment to Facilities energy use was changed from 50/50 to 40/60. • Water Conservation (Tables 102 and 105) • Eliminated redundancy by locating data only in Table 102.

  6. Chemical/Materials Management Table 103 • Dropped requirements for safe dopant delivery systems (goal achieved) and expanded definition of dopant requirements. • Revised high-k materials of concern (dropped Ni, added Cr+6).

  7. Areas Under Discussion for 2005

  8. Chemical/Materials Management Table 102 • Revise “USE” metric to a “UTILIZATION” value . • Intend to replace generic recycling requirements with specific recycling technology – need industry comment on where this is appropriate. Table 103 • Validate the percent of current copper reclaim/recycle. • Replace generic improvement requirements with utilization factors.

  9. Emerging Research Materials • Need to identify existing ESH restrictions pertaining to ERMs research. • Need to understand impact of uncertain future ESH barriers on ERMs. • New and emerging materials may have unique metrology requirements. e.g. – Nanomaterials

  10. Synergy Between Technology R&D and ESH Legislative and Regulatory Development • Lack of synergy between technology R&D and ESH legislative/regulatory development. – Improve “crystal ball” • Regional differences in chemical regulatory restrictions (government and/or supplier constrained).

  11. Data Collection • More installed base data are required to identify performance trends. • Need better definition for “Manufacturable solutions exist” with regard to ESH requirements. • Collect more data to establish baseline environmental burden.

  12. Resource Conservation Targets • A difference exists between resource targets (water, energy, etc.) for ITRS and existing technology. • Compare 300mm wafer actuals versus the original 200mm to 300mm conversion goals

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