Upgraded Ion Source Mevva-V.Ru for Metal Ion Beam Implantation
Upgraded Ion Source Mevva-V.Ru for Metal Ion Beam Implantation A.G. Nikolaev, E.M. Oks, K.P. Savkin, G.Yu. Yushkov , I.G. Brown * High Current Electronics Institute of Siberian Division of Russian Academy Science, Tomsk, Russia * Lawrence Berkeley National Laboratory, Berkeley,
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