SEMI STEP: Introduction to SEMI S2-0706

1. SEMI STEP:Introduction to SEMI S2-0706 The Future of SEMI S2 Chris Evanston, PE Program Manager Earth Tech Microelectronics Chris.evanston@earthtech.com

2. Introduction to SEMI S2-0706The Future of SEMI S2 Agenda • Where have we been • The origin of S2 • The development of S2 • The Current Status of S2 • Inside SEMI • Outside SEMI • Projections • Future Development: Near Term • Future Development: Long Term SEMI STEP: Introduction to SEMI S2-0706

3. The Origin of SEMI S2 • As the semiconductor industry developed it became apparent that no established standards addressed the safety concerns of the industry • The natural response was for companies to develop their own standards • The next rational step in the evolution of this process was to develop on common industry standard • This would reduce cost because equipment manufacturers would not have to comply with numerous standards • An improve safety by driving toward best industry practices. • Out of this process SEMI S2 was born SEMI STEP: Introduction to SEMI S2-0706

4. SEMI S2-91 A Revolution in Product Safety • Developed with strong end user input • Comprehensive nature • Single-point failure clause • Report as an information document • Requires hazard evaluation • Continuing development • Electrical, Interlocks, EMO • Robotics • Mechanical & Robots • Earthquake • Fire Protection • Radiation • Chemical & Industrial Hygiene • Noise • Environmental • Ventilation and Exhaust • Lasers • Ergonomics SEMI STEP: Introduction to SEMI S2-0706

5. The Evolution of SEMI S2 SEMI S2-91 (Initial Guideline) Small Upgrades and Clarifications SEMI S2-93 (First Complete Revision) Internationalization + Major Upgrades and Clarifications SEMI S2-0200 (Second Complete Revision) The Last Complete Revision Planned Incremental Upgrades and Revisions SEMI S2-0703 (Only Line Item Changes) Incremental Upgrades and Clarifications SEMI S2-0706 (Line Items on 3 Year Cycle) SEMI STEP: Introduction to SEMI S2-0706

6. S2 is an Umbrella Document Although S2 may not change significantly Its supporting standards are still evolving Major Revision Recently Passed Major Revision In The Works S2 S1 Labels S3 Heated Baths S6 Ventilation S8 Ergonomics S10 Risk S14 Fire S18 Silane S22 Electrical S23 Energy Significant New Support Guidelines SEMI STEP: Introduction to SEMI S2-0706

7. Use Of S2 End Users and Regulators END USERS It Has Become the essential Safety Standard Used By End Users World Wide US Authorities Some Fire Marshals Have Been Using It in the US European Authorities Many Use It to Support their MD/LVD Compliance Efforts SEMI STEP: Introduction to SEMI S2-0706

8. S2 Outside the Semiconductor Industry • Flat Panel Industry is developing a standard based on S2 • The use of S2 in non-semiconductor manufacturing environments has been growing. • Disk Drive Industry • Medical Device Companies • It is viewed by increasing numbers of companies outside the semiconductor industry as a sound way to address safety issues in technology driven industries. • The growth of S2 beyond the semiconductor industry is something the industry never envisioned. SEMI STEP: Introduction to SEMI S2-0706

9. Projections For The Near Term Development of SEMI S2 • No Major Changes in SEMI S2 appear on the horizon. • Incremental line item changes will continue on a three year revision cycle • Potential significant changes will occur in SEMI S2’s supporting guidelines – this should be watched • S2 application has already saturated the semiconductor market place for production equipment – but its use for related equipment seems to be growing (Abatement equipment is one example) • Increasing use in related industries and non-related technology driven industries appears to be an emerging trend. SEMI STEP: Introduction to SEMI S2-0706

10. Projections For The Near Term Development of SEMI S2 • The future of SEMI S2’s use by regulators is less clear. However, it seems that as regulators become more aware of how the industry manages its own safety concerns they will continue to look at it as a useful resource Summary • S2 will continue to grow in technical sophistication.Its use inside and outside the industry will continue to grow. SEMI STEP: Introduction to SEMI S2-0706

11. Projections For The Long Term Development of SEMI S2 The complexity of the semiconductor manufacturing process and its diverse hazards is ultimately what drove the emergence of S2 This increasing severity and diversity of hazards as well as growing complexity of equipment is a reality that describes more and more industries in the 21st century. Therefore, it seems reasonable to conclude that the S2 approach to safety is something that is going to expand. SEMI STEP: Introduction to SEMI S2-0706

12. Projections For The Long Term Development of SEMI S2 Because S2 itself is driven by the complexity of the manufacturing process, it is reasonable to conclude that it will continue to be an increasingly major factor in the long term both inside and outside the semiconductor industry. If other technology driven industries require significant variations from S2, then the S2 approach will still continue to grow because the increasing complexity of technology driven production requires an approach of this type to control hazards inherent in those protection processes. The revolutionary approach to product safety that started with S2-91 will continue to expand because the needs of technology driven industries demand it. SEMI STEP: Introduction to SEMI S2-0706